Periodically ordered ZnO nanopillar arrays were fabricated by a combination of soft templates created by e-beam lithography and an electrochemical process. Growth at 90 °C in an aqueous solution ensured compatibility with the polymethyl methacrylate used as a template material. We demonstrate that individual ZnO nanopillars with diameters around 100 nm can be precisely placed in desired locations to form two-dimensional periodic structures. This approach provides a new method for design and fabrication of ZnO photonic materials. The process is compatible with standard microfabrication techniques and may have potential applications in the manufacture of photonic and optoelectronic devices.
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