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UV Assisted Rapid Thermal Processing of Strontium Bismuth Tantalate (SBT) Thin Films
Published online by Cambridge University Press: 01 February 2011
Abstract
A novel technique termed UV-assisted RTP has been developed and found to offer improvement in material properties, in particular when applied to thin films. Regarding crystallization of SBT, a number of UV-RTP strategies were developed and evaluated. It was demonstrated that UV irradiation of the sample material at a temperature in excess of the MOCVD deposition temperature was found to produce a significant increase in Pr.
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- Copyright © Materials Research Society 2005
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