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On the Entrance Effects and the Influence of Buoyancy Forces on the Fluid Flow In Rtp Reactors

Published online by Cambridge University Press:  10 February 2011

Yu. P. Rainova ,
K. I. Antonenko ,
J. Pezoldt  and
A. Schenk
Yu. P. Rainova
Affiliation:
Moscow State Institute of Electronic Engineering, Department of Physical Chemistry Fundamentals of Microelectronics Technology, 103498 Moscow, Russian Federation
K. I. Antonenko
Affiliation:
Moscow State Institute of Electronic Engineering, Department of Physical Chemistry Fundamentals of Microelectronics Technology, 103498 Moscow, Russian Federation
J. Pezoldt
Affiliation:
TU Iimenau, Institut für Festkörperlelktronik, Postfach 100565, D-98693 Iimenau, Germany, pezoldt@e-technik.tu-ilmenau.de
A. Schenk
Affiliation:
TU Iimenau, Institut für Festkörperlelktronik, Postfach 100565, D-98693 Iimenau, Germany
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Abstract

Flow and heat transfer effects play a critical role in chemical vapour deposition (CVD) reactors. Holographic interferometry offers the possibility to study the flow dynamics of an entire region in real time under process conditions with negligible disturbances of the investigated process. The advantage of the method is the possibility of accurate measurements of flow patterns and temperature profiles in a fast dynamic process under actual experimental conditions. Mixed and forced flow conditions were studied for two gases with distinct different thermophysical properties. The influence of the gas inlet system and buoyancy forces on the resulting fluid flow are highlighted. A special attention was drawn on the visualization of edge effects.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 525: Symposium W – Rapid Thermal & Integrated Processing VII , 1998 , 39
Copyright
Copyright © Materials Research Society 1998

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