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Metrological Assessment of the Coefficient of Friction of Various Types of Silica Using the Motor Current During ILD-CMP
Published online by Cambridge University Press: 15 March 2011
Abstract
In the work presented the coefficient of friction (COF) was firstly determined metrologically by a systematic assessment of motor currents for different products of pressure and velocity (p v). With all seven test slurries it could be shown that the inserted energy ECMP is proportional to the product of pressure and velocity. The COF of the parameter domain considered here does not depend on the inserted energy or the product of p v in a first approximation. For all tested slurries it was demonstrated that, both the COF and the removal rate (RR) behave analogously (low COF→ low RR).
Measurements of the viscosity η have shown that η is not a constant in the shear rate range relevant for CMP. Using the obtained viscosity values a mean slurry film thickness in the range of 2,5 -C 6 μm could be calculated.
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- Copyright © Materials Research Society 2004
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