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Bi-Directional Motion Achieved with a Surface Micromachined Electrothermal MEMS Microengine
Published online by Cambridge University Press: 01 February 2011
Abstract
This research is focused on the design and experimental characterization of an electrothermal microengine that is capable of bi-directional motion. The microengine has been operated to control the position a linear shuttle and rotate a set of gears.
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- Copyright © Materials Research Society 2004