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Investigation of the Bi-linear Behavior of the Indentation Size Effects in Single and Polycrystalline Ni Thin Films/MEMS Thin Films

Published online by Cambridge University Press:  26 February 2011

Abdelmageed A. Elmustafa ,
J. Lou ,
Z. Zong  and
W. O. Soboyejo
Abdelmageed A. Elmustafa
Affiliation:
aelmusta@odu.edu, Old Dominion University, Mechanical Engineering and The Applied Research Center, 238 Kaufman Hall, Norfolk, VA, 23529, United States, (757) 683-5576
J. Lou
Affiliation:
jlou@rice.edu, Rice University, Department of Mechanical Engineering and Materials Science, Houston, TX, 77005, United States
Z. Zong
Affiliation:
zzong@Princeton.EDU, Princeton University, Princeton Institute of Science and Technology of Materials (PRISM) and Department of Mechanical, Princeton, NJ, 08544, United States
W. O. Soboyejo
Affiliation:
soboyejo@Princeton.EDU, Princeton University, Princeton Institute of Science and Technology of Materials (PRISM) and Department of Mechanical, Princeton, NJ, 08544, United States
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Abstract

This paper presents the results of an experimental study of the indentation size effects at the nano, sub-micron, and micron-scales. The size dependence of the indentation hardness in these regimes is shown to exhibit a bi-linear behavior when the data are fitted to Taylor Dislocation Hardening (TDH) model. The deformation in indent sizes corresponding to the onset of the transition from micro and deep nano indents to shallow nano indents represent dislocation substructures at the sub-micron and micron scales whereas the deformation at the nano-scale represents dislocation source-limited behavior.

Keywords

nanoscaleNihardness
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 976: Symposium EE – Size Effects in the Deformation of Materials – Experiments and Modeling , 2006 , 0976-EE06-21
Copyright
Copyright © Materials Research Society 2007

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