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Impact, Friction, and Wear Testing of Microsamples of Polycrystalline Silicon

Published online by Cambridge University Press:  15 February 2011

Abraham P. Lee ,
Albert P. Pisano  and
Martin G. Lim
Abraham P. Lee
Affiliation:
University of California, Department of Mechanical Engineering, Berkeley Sensor & Actuator Center, 497 Cory Hall, Berkeley CA 94720, U.S.A.
Albert P. Pisano
Affiliation:
University of California, Department of Mechanical Engineering, Berkeley Sensor & Actuator Center, 497 Cory Hall, Berkeley CA 94720, U.S.A.
Martin G. Lim
Affiliation:
Xerox Palto Alto Research Center, Palo Alto, CA, U.S.A.
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Abstract

This paper gives an overview of the recent developments in impact, friction, and wear testing of polycrystalline silicon (polysilicon) based micro electromechanical structures. Impact-friction actuated micromechanisms form a new type of actuators. In this type of actuators, lateral resonant structures are retracted by electrostatic comb drives and are propelled forward toward the actuated micromechanism by elastic forces generated by folded beam flexures at frequencies ranging from 10 kHz to 20 kHz. This sequence generates normal impact and tangential friction contact between the two microstructures, raising wear concerns. Two sorts of impact test structures are introduced in this paper, One with a resonant micro impact bumper (MIB) striking a stationary impact wall anchored ofn the substrate. Another is a testing of two MIBs driven to impact each other. Two types of impact actuators are also described, an impact actuated micro angular oscillator (MAO) and a polysilicon micro vibromotor. The vibromotor is a rotor driven by oblique impact on the rim by a converter pointer tip attached to a lateral resonator. Some initial results of impact wear testing as well as static and dynamic friction done by researchers in the field are also described in the paper. Finally, many areas where material scientists can contribute to this field are suggested.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 276: Symposia U/Y – Smart Materials Fabrication and Materials for Micro-Electro-Mechanical Systems , 1992 , 67
Copyright
Copyright © Materials Research Society 1992

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References

REFERENCES

1. Fan, L. S., ”Integrated Micromachinary: Technology, Material, and Devices”. PhD thesis, University of California, Berkeley, CA © 1989.Google Scholar
2. Tai, Y. C., ”IC-Processed Polysilicon Micromechanics: Technology, Material, and Devices”, PhD Thesis, University of California, Berkeley, CA © 1989.Google Scholar
3. Mehregany, M., Microfabricated Silicon Electric Mechanisms© 1990.Google Scholar
4. Tai, Y.-C., ”IC-Processed Electrostatic Synchronous Micromotors”, Sensors and Actuators, vol.20, nos. 1 and2, pp. 49–55,1989.CrossRefGoogle Scholar
5. Mehregany, M., Nagarkar, P., Senturia, S.D., and Lang, J.H., ”Operation of Microfabricated Harmonic and Ordinary Side-Drive Motors”, Proceedings of MEMS ‘90, pp.1–8, Napa Valley, CA, USA, 1990.Google Scholar
6. Tang, W. C., Nguyen, T-C., and Howe, R. T., ”Laterally Driven Polysilicon Resonant Microstructures”, Sensors and Actuators, vol.20, pp.25–32, 1989.Google Scholar
7. Pisano, A.P. and Cho, Y.-H., ”Mechanical Design Issues in Laterally-driven Microstructures”, Sensors and Actuators, 1989.Google Scholar
8. Pisano, A.P., ”Resonant-structure Micromotors: Historical Perspective and Analysis”, Sensors and Actuators, vol.20, pp.83–89, 1989.CrossRefGoogle Scholar
9. Lee, A.P. and Pisano, A.P., ”Repetitive Impact Testing of Micromechanical Structures”Google Scholar
10. Lee, A.P., Pisano, A.P., and Lin, L., ”Normal and Tangential Impact in Micro Electromechanical Structures”, Proceedings of MEMS 91, Nara, Japan, Jan.31-Feb.2, 1991.Google Scholar
11. Lee, A.P. and Pisano, A.P., ”An Impact-Actuated Micro Angular Oscillator”, ASME Winter Annual Meeting, Atlanta, GA, Dec.2-7, 1991.Google Scholar
12. Lee, A.P, Ljung, P.B, and Pisano, A.P, “Polysilicon Micro Vibromotors”, Proceedings of the IEEE workshop on Micro Electro Mechanical Systems, Feb. 4-7, 1992, Travemünde, Germany.Google Scholar
13. Gabriel, K.J., Behi, F., and Mahadevan, R., ”In situ Friction and Wear Measurements in Integrated Polysilicon Mechanisms”, Sensors and Actuators, vol.A21–23, pp.184–188, 1990.Google Scholar
14. Tai, Y.-C. and Muller, R.S., ”Frictional Study of IC-processed Micromotors”, Sensors and Actuators, vol. A21–23, pp.180–183, 1990.Google Scholar
15. Lim, M.G., ”Polysilicon Microstructures to Characterize Static Friction”, Master's Report, Dept. of ME, UC Berkeley, September 1990.Google Scholar
16. Noguchi, K., Hiroyuki, F., Suzuki, M., Yoshimura, N., ‘The Measurements of Friction on Micromechatronics Elements”, Proceedings of the 4th IEEE Workshop on Micro Electro Mechanical Systems (MEMS), Nara, Japan, 30 January - 2 February.Google Scholar
17. Suzuki, S., Matsuura, T., Uchizawa, M., Yura, S., and Shibata, H., ”Friction and Wear Studies on Lubricants and Materials Applicable to MEMS”, Proceedings of the 4th IEEE Workshop on Micro Electro Mechanical Systems (MEMS), Nara, Japan, 30 January - 2 FebruaryGoogle Scholar