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Micromachined SFM Probes for High-Frequency Electric and Magnetic Fields
Published online by Cambridge University Press: 10 February 2011
Abstract
We discuss micromachined localized high-frequency electric (coaxial) and magnetic (loop) field probes integrated with scanning force microscopes. Our approach enables simultaneous acquisition of both field and topography in the radio frequency (RF) through millimeter-wave regime, enabling more complete characterization of materials, devices and circuits.
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- Copyright © Materials Research Society 1998