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Large Scale Production of Carbon Nanotube Transistors: A Generic Platform for Chemical Sensors
Published online by Cambridge University Press: 15 February 2011
Abstract
We report our work on the fabrication of nanotube-based field effect transistors (NTFET). Nanotubes were grown by chemical vapor deposition using various approaches, including a new formulation of nanotube growth catalysts that were directly patterned using UV lithography. We also report NTFETs based on randomly oriented nanotube networks that have a modulation of one. Finally, we report that a systematical and statistical characterization of millions of devices has led to the development of a robust process that may be useful in large scale production of reproducible, nanotube-based FETs, which, in turn, can be used as a generic platform for chemical sensors.
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- Copyright © Materials Research Society 2003
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