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Methods to Measure Mechanical Properties of NEMS and MEMS: Challenges and Pitfalls
Published online by Cambridge University Press: 31 January 2011
Abstract
This paper focuses on the measurement of material properties of micro and nano-electromechanical systems. Two different methods are discussed: electrical or optical measurements of the resonance frequency, and measurements of the Raman frequency shift. The main focus of this paper is on challenges and pitfalls related to the use of these techniques for the study of MEMS and NEMS.
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- Copyright © Materials Research Society 2009
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