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Interplay between Morphology and Surface Transport in Nanopatterns Produced by Ion-Beam Sputtering

Published online by Cambridge University Press:  01 February 2011

Rodolfo Cuerno ,
Javier Muñoz-García ,
Mario Castro ,
Raúl Gago  and
Luis Vázquez
Rodolfo Cuerno
Affiliation:
cuerno@math.uc3m.es, Universidad Carlos III de Madrid, Departamento de Matemáticas, Avenida de la Universidad 30, Leganés (Madrid), 28911, Spain, +34916245944, +34916249129
Javier Muñoz-García
Affiliation:
javiermunozgarcia@gmail.com, Universidad de Castilla la Mancha, Departamento de Matemáticas and GISC, Ciudad Real, E-13071, Spain
Mario Castro
Affiliation:
mariocastro73@gmail.com, Universidad Pontificia Comillas de Madrid, Escuela Técnica Superior de Ingeniería (ICAI) and GISC, Madrid, E-28015, Spain
Raúl Gago
Affiliation:
raul.gago@uam.es, Universidad Autónoma de Madrid, Centro de Microanálisis de Materiales, Madrid, E-28049, Spain
Luis Vázquez
Affiliation:
lvb@icmm.csic.es, Consejo Superior de Investigaciones Científicas, Instituto de Ciencia de Materiales de Madrid, Madrid, E-28049, Spain
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Abstract

A “hydrodynamic” model has been proposed to describe nanopattern formation and dynamics on amorphous surfaces eroded by ion-beam sputtering (IBS), that relates to descriptions of pattern formation in macroscopic systems such as aeolian sand dunes. At variance with previous continuum models of the morphology of ion-sputtered surfaces, the dynamics of the species that diffuse along the surface is coupled in a natural way to that of the surface height. We report recent results for this model, considering normal and oblique ion incidence, for both fixed and rotating targets, and include comparison to recent experiments on silicon. Effective interface equations can be obtained, that generalize the anisotropic Kuramoto-Sivashinshy equation through additional conserved Kardar-Parisi-Zhang type nonlinear terms. In general dot or ripple patterns form, that later evolve exhibiting complex nonlinear dynamics. Thus, we observe interrupted coarsening behavior such that, for normal incidence, domains of hexagonally ordered structures appear, that compare favorably with those obtained in many experiments of nanodot formation by IBS. In other parameter regions, this short-range ordered patterns coexist with long range disorder and kinetic roughening. For oblique incidence, a ripple pattern is generically obtained that also shows interrupted coarsening and other nonlinear features like non-uniform transverse motion, again reproducing experimental observations.

Keywords

ion-beam processingnanostructuresimulation
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1059: Symposium KK – Nanoscale Pattern Formation , 2007 , 1059-KK01-06
Copyright
Copyright © Materials Research Society 2008

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