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Titanium Hafnium Oxide Alloy Films by a Novel Sub-Atomic Layer Sputtering Process for High Index and Graded Index Applications

Published online by Cambridge University Press:  07 October 2013

Nobuhiko P. Kobayashi ,
R. Ernest Demaray ,
Junce Zhang ,
Kate J. Norris ,
David M. Fryauf ,
Juan J. Díaz León ,
Amanda Flores ,
Ravi Mullapdi ,
Tana Arunagiri  and
Lai Lu
Nobuhiko P. Kobayashi
Affiliation:
Baskin School of Engineering, UCSC, Santa Cruz, CA, U.S.A.; Nanostructured Energy Conversion Technology and Research (NECTAR), Advanced Studies Laboratories, University of California Santa Cruz - NASA Ames Research Center, Moffett Field, CA, U.S.A.
R. Ernest Demaray
Affiliation:
Antropy Inc. & Demaray LLC, Portola Valley, California, U.S.A.
Junce Zhang
Affiliation:
Baskin School of Engineering, UCSC, Santa Cruz, CA, U.S.A.; Nanostructured Energy Conversion Technology and Research (NECTAR), Advanced Studies Laboratories, University of California Santa Cruz - NASA Ames Research Center, Moffett Field, CA, U.S.A.
Kate J. Norris
Affiliation:
Baskin School of Engineering, UCSC, Santa Cruz, CA, U.S.A.; Nanostructured Energy Conversion Technology and Research (NECTAR), Advanced Studies Laboratories, University of California Santa Cruz - NASA Ames Research Center, Moffett Field, CA, U.S.A.
David M. Fryauf
Affiliation:
Baskin School of Engineering, UCSC, Santa Cruz, CA, U.S.A.; Nanostructured Energy Conversion Technology and Research (NECTAR), Advanced Studies Laboratories, University of California Santa Cruz - NASA Ames Research Center, Moffett Field, CA, U.S.A.
Juan J. Díaz León
Affiliation:
Baskin School of Engineering, UCSC, Santa Cruz, CA, U.S.A.; Nanostructured Energy Conversion Technology and Research (NECTAR), Advanced Studies Laboratories, University of California Santa Cruz - NASA Ames Research Center, Moffett Field, CA, U.S.A.
Amanda Flores
Affiliation:
Baskin School of Engineering, UCSC, Santa Cruz, CA, U.S.A.; Nanostructured Energy Conversion Technology and Research (NECTAR), Advanced Studies Laboratories, University of California Santa Cruz - NASA Ames Research Center, Moffett Field, CA, U.S.A.
Ravi Mullapdi
Affiliation:
Tango Systems, Inc. San Jose, California, U.S.A.
Tana Arunagiri
Affiliation:
Tango Systems, Inc. San Jose, California, U.S.A.
Lai Lu
Affiliation:
Tango Systems, Inc. San Jose, California, U.S.A.
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Abstract

We studied physical properties of titanium hafnium oxide (TixHf1-xO2) alloy thin films deposited by pulsed DC reactive magnetron sputtering with AC substrate bias. Thin films of two end oxides, hafnium oxides (HfO2) and titanium oxides (TiO2), and their alloys TixHf1-xO2 with a range of compositions deposited with and without the substrate bias were compared to study the dependence of physical properties of the thin films on the substrate bias. Structural, chemical and optical properties of the thin films were analyzed to assess inter-relationship among these properties. Thin films deposited with the AC substrate bias consistently show much higher refractive index and significantly lower optical extinction coefficient than those of thin films deposited without the substrate bias suggesting that characteristic microstructures developed in these thin films are responsible for the differences in the optical properties.

Keywords

amorphoussputteringoptical properties
Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 1565: Symposium HH – Materials for High-Performance Photonics II , 2013 , mrss13-1565-hh05-08
Copyright
Copyright © Materials Research Society 2013 

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