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Nanometer-scale Characterization Tools for Strain-Engineered Semiconductor Devices

Published online by Cambridge University Press:  09 October 2013

V.B. Ozdol ,
C.T. Koch  and
A.M. Minor
V.B. Ozdol
Affiliation:
C.T. Koch
Affiliation:
A.M. Minor
Affiliation:

Abstract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2013 in Indianapolis, Indiana, USA, August 4 – August 8, 2013.

Type
Abstract
Information
Microscopy and Microanalysis , Volume 19 , Issue S2: Proceedings of Microscopy & Microanalysis 2013 , August 2013 , pp. 1076 - 1077
Copyright
Copyright © Microscopy Society of America 2013