The improvement of corrosion resistance of ZrN1-xCx films (0 ≤ x ≤ 1) on AISI stainless steel (ss) 304 is studied as a function of methane flow rate introduced into mixture of argon and nitrogen gases (Ar + N2). The films were deposited using ion beam sputtering technique at 400 °C and their corrosion resistance has been investigated via electrochemical test using 0.5 M H2SO4 solution. Scanning electron microscopy (SEM) and X-ray diffraction (XRD) were performed to study the micro and nano-structures of the films. Film stoichiometry was determined by Rutherford backscattering (RBS) technique using SIMNRA code. An average grain size of 7 nm was calculated for deposited films using Scherrer's formula. X-ray diffraction results showed
the presence of a transition crystalline phase from ZrN to ZrC phase corresponding to the formation of ZrN1-xCx crystalline phase. The electrochemical test revealed that the film corrosion resistance increased with increasing x values. Furthermore, micrographs obtained by SEM did not
indicate any damage on the sample surface due to corrosive agent attacks for x > 0.6.