2 results
Selective one-step Chemical Etching of the Silicon Nitride/Silicon PBL stack for 0.5μm device Fabrication
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- Journal:
- MRS Online Proceedings Library Archive / Volume 386 / 1995
- Published online by Cambridge University Press:
- 15 February 2011, 27
- Print publication:
- 1995
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In situ capacitance studies of thin polymer films during compressed fluid extraction
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- Journal:
- Journal of Materials Research / Volume 2 / Issue 6 / December 1987
- Published online by Cambridge University Press:
- 31 January 2011, pp. 884-894
- Print publication:
- December 1987
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