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3C–SiC/Si/3C–SiC epitaxial trilayer films deposited on Si(111) substrates by reactive magnetron sputtering
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- Journal:
- Journal of Materials Research / Volume 10 / Issue 6 / June 1995
- Published online by Cambridge University Press:
- 03 March 2011, pp. 1349-1351
- Print publication:
- June 1995
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- Article
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