1 results
Tert-butylamine and Allylamine as Reductive Nitrogen Sources in Atomic Layer Deposition of TaN Thin Films
-
- Journal:
- Journal of Materials Research / Volume 17 / Issue 1 / January 2002
- Published online by Cambridge University Press:
- 31 January 2011, pp. 107-114
- Print publication:
- January 2002
-
- Article
- Export citation