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16 - Micro LIBS technique
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- By Pascal Fichet, CEA Saclay, France Cécile Fabre, Jean Dubessy, Marie-Christine, Jean-Luc Lacour, CEA Saclay, France Cécile Fabre, Jean Dubessy, Marie-Christine, Denis Menut, CEA Saclay, France Cécile Fabre, Jean Dubessy, Marie-Christine, Patrick Mauchien, CEA Saclay, France Cécile Fabre, Jean Dubessy, Marie-Christine, Annie Rivoallan, Cécile Fabre, Jean Dubessy, Marie-Christine Boiron, Equipes Interactions entre Fluides et Minéraux, Université Henri Poincaré, France
- Edited by Andrzej W. Miziolek, Vincenzo Palleschi, Israel Schechter, Technion - Israel Institute of Technology, Haifa
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- Book:
- Laser Induced Breakdown Spectroscopy
- Published online:
- 08 August 2009
- Print publication:
- 07 September 2006, pp 539-555
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- Chapter
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Summary
Introduction
The LIBS technique (laser-induced breakdown spectroscopy) has been applied mainly for the bulk analysis of solids [1], liquids [2], or gases [3], but more sparsely for elemental microanalysis of solid surfaces. In this chapter we describe different results obtained with a micro LIBS device devoted to element distribution analysis on solid surfaces and to localized analysis. The crater diameter and its shape are two crucial parameters that have to be well controlled to obtain reliable results. After a description of different published results concerning micro plasmas and recent applications of surface analysis, a complete description of a laboratory micro LIBS device is reported. The smallest crater diameter achieved with the experimental set-up and that can be used for analytical purposes is 3 μm. An original device offering an attractive feature to obtain regular spaced craters is also presented. The characteristics of the system in terms of quantitative analysis are highlighted. Different element distributions on surfaces of ceramics and steel samples are shown to demonstrate the very high potential of micro LIBS for elemental microanalysis. Finally, the micro LIBS technique is presented as a powerful analytical method for geological samples.
The use of a microscope combined with a laser has been reviewed previously [4]. This present chapter provides information on technical details of manufactured microanalyzers combined with a spark-gap device, positioned above the sample surface, to make localized analysis. With the different manufactured systems, crater diameters from laser ablation could vary from 10 μm to 1 mm.