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16 - Micro LIBS technique

Published online by Cambridge University Press:  08 August 2009

By
Pascal Fichet ,
Jean-Luc Lacour ,
Denis Menut ,
Patrick Mauchien ,
Annie Rivoallan ,
Cécile Fabre ,
Jean Dubessy  and
Marie-Christine Boiron
Edited by
Andrzej W. Miziolek ,
Vincenzo Palleschi  and
Israel Schechter
Pascal Fichet
Affiliation:
CEA Saclay, France Cécile Fabre, Jean Dubessy, Marie-Christine
Jean-Luc Lacour
Affiliation:
CEA Saclay, France Cécile Fabre, Jean Dubessy, Marie-Christine
Denis Menut
Affiliation:
CEA Saclay, France Cécile Fabre, Jean Dubessy, Marie-Christine
Patrick Mauchien
Affiliation:
CEA Saclay, France Cécile Fabre, Jean Dubessy, Marie-Christine
Marie-Christine Boiron
Affiliation:
Equipes Interactions entre Fluides et Minéraux, Université Henri Poincaré, France
Andrzej W. Miziolek
Affiliation:
U.S. Army Research Laboratory, USA
Vincenzo Palleschi
Affiliation:
Istituto per I Processi Chimico-Fisici, Italy
Israel Schechter
Affiliation:
Technion - Israel Institute of Technology, Haifa
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Summary

Introduction

The LIBS technique (laser-induced breakdown spectroscopy) has been applied mainly for the bulk analysis of solids [1], liquids [2], or gases [3], but more sparsely for elemental microanalysis of solid surfaces. In this chapter we describe different results obtained with a micro LIBS device devoted to element distribution analysis on solid surfaces and to localized analysis. The crater diameter and its shape are two crucial parameters that have to be well controlled to obtain reliable results. After a description of different published results concerning micro plasmas and recent applications of surface analysis, a complete description of a laboratory micro LIBS device is reported. The smallest crater diameter achieved with the experimental set-up and that can be used for analytical purposes is 3 μm. An original device offering an attractive feature to obtain regular spaced craters is also presented. The characteristics of the system in terms of quantitative analysis are highlighted. Different element distributions on surfaces of ceramics and steel samples are shown to demonstrate the very high potential of micro LIBS for elemental microanalysis. Finally, the micro LIBS technique is presented as a powerful analytical method for geological samples.

The use of a microscope combined with a laser has been reviewed previously [4]. This present chapter provides information on technical details of manufactured microanalyzers combined with a spark-gap device, positioned above the sample surface, to make localized analysis. With the different manufactured systems, crater diameters from laser ablation could vary from 10 μm to 1 mm.

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Laser Induced Breakdown Spectroscopy , pp. 539 - 555
Publisher: Cambridge University Press
Print publication year: 2006

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References

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