The size distributions of aerosol particles generated in N2 and O2 at ambient atmospheric pressure by repetitive excimer laser ablation of solids have been measured in quasi-steady-state from 10 nm to 1 μm diameter with a differential mobility analyzer (DMA). A light scattering technique extended the range of measurable sizes up to 20 μm, beyond the upper limit of sizes observed in the aerosol. Irradiation near focus was required to observe metal particles above 0.1 μm diameter. YBCO ceramic (YBa2Cu3O7) produced copious smaller particles with mild focusing. For an ablated polymer, PMMA, particulate production increased and the size distribution altered shape with continued energy deposition.