11 results
Two Different Interactions between Oxygen Vacancies and Dopant Cations for Ionic Conductivity in CaO-Doped CeO2 Electrolyte Materials
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 658 / 2000
- Published online by Cambridge University Press:
- 18 March 2011, GG99.1
- Print publication:
- 2000
-
- Article
- Export citation
Plasma Chemistry Study of Plasma Ion Implantation Doping for Cmos Devices
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 510 / January 1998
- Published online by Cambridge University Press:
- 10 February 2011, 239
- Print publication:
- January 1998
-
- Article
- Export citation
Low-Dielectric Constant SiO(F,C) Films for ULSI Interconnections Prepared by CF4 Plasma Ion Implantation
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 511 / 1998
- Published online by Cambridge University Press:
- 10 February 2011, 63
- Print publication:
- 1998
-
- Article
- Export citation
Plasma Ion Implantation for Flat Panel Displays
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 438 / 1996
- Published online by Cambridge University Press:
- 03 September 2012, 321
- Print publication:
- 1996
-
- Article
- Export citation
Investigations of Plasma Immersion Ion Implantation Hydrogenation for Poly-Si Tfts Using an Inductively Coupled Plasma Source
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 438 / 1996
- Published online by Cambridge University Press:
- 03 September 2012, 357
- Print publication:
- 1996
-
- Article
- Export citation
Plasma Immersion Ion Implantation Modification of Surface Properties of Polymer Material
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 438 / 1996
- Published online by Cambridge University Press:
- 03 September 2012, 511
- Print publication:
- 1996
-
- Article
- Export citation
Investigations of Plasma Immersion Ion Implantation Hydrogenation for Poly-Si Tfts Using an Inductively Coupled Plasma Source
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 439 / 1996
- Published online by Cambridge University Press:
- 15 February 2011, 269
- Print publication:
- 1996
-
- Article
- Export citation
N-Type Doping by Plasma Ion Implantation Using a PH3 SDS System
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 438 / 1996
- Published online by Cambridge University Press:
- 03 September 2012, 351
- Print publication:
- 1996
-
- Article
- Export citation
Short-Time Hydrogen Passivation of Poly-Si CMOS Thin film Transistors by High Dose Rate Plasma Ion Implantation
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 396 / 1995
- Published online by Cambridge University Press:
- 21 February 2011, 515
- Print publication:
- 1995
-
- Article
- Export citation
Nitrogen Plasma Ion Implantation into Carbon Films Deposited by the Anodic Vacuum ARc
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 388 / 1995
- Published online by Cambridge University Press:
- 21 February 2011, 281
- Print publication:
- 1995
-
- Article
- Export citation
Carbon Nitride (Cnx) Films Formed by Ion Implantation into Thin Carbon Films
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 396 / 1995
- Published online by Cambridge University Press:
- 21 February 2011, 255
- Print publication:
- 1995
-
- Article
- Export citation