In our previous work we have obtained YBCO thick films on silver alloy substrate via the peritectic solidification. To further develop grain-textured YBCO thin films for conductor development, in this study, we have used a sol gel approach to deposit YBCO thin films on two different substrates, namely, yttrium-stabilized zirconia (YSZ) and a silver alloy containing 10 % of palladium (Ag –10%Pd). We have found that the sol gel film on YSZ exhibits an epitaxial growth. This is confirmed by both x-ray diffraction (XRD) and high-resolution transmission electron microscopy (HRTEM). XRD data also indicate that the YBCO film on Ag-10%Pd has a c-axis grain orientation. The details are reported on sol gel synthesis and XRD and HRTEM characterization of the YBCO thin films.