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Evaluation of elastic modulus and hardness of thin films by nanoindentation

Published online by Cambridge University Press:  01 October 2004

Yeon-Gil Jung ,
Brian R. Lawn ,
Mariusz Martyniuk ,
Han Huang  and
Xiao Zhi Hu
Yeon-Gil Jung
Affiliation:
Materials Science and Engineering Laboratory, National Institute of Standards and Technology, Gaithersburg, Maryland 20899-8500
Brian R. Lawn*
Affiliation:
Materials Science and Engineering Laboratory, National Institute of Standards and Technology, Gaithersburg, Maryland 20899-8500
Mariusz Martyniuk
Affiliation:
School of Electrical, Electronic and Computer Engineering, The University of Western Australia, Crawley, WA 6009, Australia
Han Huang
Affiliation:
School of Mechanical Engineering, The University of Western Australia, Crawley, WA 6009, Australia
Xiao Zhi Hu
Affiliation:
School of Mechanical Engineering, The University of Western Australia, Crawley, WA 6009, Australia
*
b)Address all correspondence to this author. e-mail: brian.lawn@nist.gov
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Abstract

Simple equations are proposed for determining elastic modulus and hardness properties of thin films on substrates from nanoindentation experiments. An empirical formulation relates the modulus E and hardness H of the film/substrate bilayer to corresponding material properties of the constituent materials via a power-law relation. Geometrical dependence of E and H is wholly contained in the power-law exponents, expressed here as sigmoidal functions of indenter penetration relative to film thickness. The formulation may be inverted to enable deconvolution of film properties from data on the film/substrate bilayers. Berkovich nanoindentation data for dense oxide and nitride films on silicon substrates are used to validate the equations and to demonstrate the film property deconvolution. Additional data for less dense nitride films are used to illustrate the extent to which film properties may depend on the method of fabrication.

Keywords

HardnessElastic propertiesNanoindentation
Type
Articles
Information
Journal of Materials Research , Volume 19 , Issue 10 , October 2004 , pp. 3076 - 3080
Copyright
Copyright © Materials Research Society 2004

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References

REFERENCES

1Oliver, W.C. and Pharr, G.M.: An improved technique for determining hardness and elastic-modulus using load and displacement sensing indentation experiments. J. Mater. Res. 7, 1564 (1992).CrossRefGoogle Scholar
2Fischer-Cripps, A.C.: Nanoindentation (Springer-Verlag, New York, 2002).CrossRefGoogle Scholar
3Sargent, P.M. In Micro Indentation Hardness Testing, ASTM Special Technical Publication 899, edited by Blau, P.J. and Lawn, B.R. (ASTM, Philadelphia, PA, 1986), pp. 160–74.Google Scholar
4Burnett, P.J. and Rickerby, D.S.: The mechanical properties of wear-resistant coatings. I. Modeling of hardness behavior. Thin Solid Films 148, 41 (1987).CrossRefGoogle Scholar
5Burnett, P.J. and Rickerby, D.S.: The mechanical properties of wear-resistant coatings. II. Experimental studies and interpretation of hardness. Thin Solid Films 148, 51 (1987).CrossRefGoogle Scholar
6Bhattacharya, A.K. and Nix, W.D.: Analysis of elastic and plastic deformation associated with indentation testing of thin films on substrates. Int. J. Solids Struct. 24, 1287 (1988).CrossRefGoogle Scholar
7Gao, H., Chiu, C-H. and Lee, J.: Elastic contact versus indentation modelling of multi-layered materials. Int. J. Solids Struct. 29, 2471 (1992).Google Scholar
8Larsson, P-L. and Peterson, I.R.M.: Evaluation of sharp indentation testing of thin films and ribbons on hard substrates. J. Test. Eval . 30, 64 (2002).CrossRefGoogle Scholar
9Tsui, T.Y., Ross, C.A. and Pharr, G.M.: A method for making substrate-independent hardness measurements of soft metallic films on hard substrates by nanoindentation. J. Mater. Res. 18, 1383 (2003).CrossRefGoogle Scholar
10Bhushan, B.: Nanomechanical characterization of solid surfaces and thin films. Int. Mater. Rev . 48, 125 (2003).CrossRefGoogle Scholar
11Perriot, A. and Barthel, E.: Elastic contact to a coated half-space: Effective elastic modulus and real penetration. J. Mater. Res. 19, 600 (2004).CrossRefGoogle Scholar
12Hu, X.Z. and Lawn, B.R.: A simple indentation stress–strain relation for contacts with spheres on bilayer structures. Thin Solid Films 322, 225 (1998).CrossRefGoogle Scholar
13Tabor, D.: Hardness of Metals (Clarendon, Oxford, 1951).Google Scholar
14Lee, S.K., Wuttiphan, S. and Lawn, B.R.: Role of microstructure in hertzian contact damage in silicon nitride: I. Mechanical characterization. J. Am. Ceram. Soc. 80, 2367 (1997).CrossRefGoogle Scholar
15McColm, I.J.: Ceramic Hardness (Plenum, New York, 1990), Table 6.9.CrossRefGoogle Scholar