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The low-complexity RF MEMS switch at EADS: an overview

Published online by Cambridge University Press:  03 August 2011

Bernhard Schoenlinner ,
Armin Stehle ,
Christian Siegel ,
William Gautier ,
Benedikt Schulte ,
Sascha Figur ,
Ulrich Prechtel  and
Volker Ziegler
Bernhard Schoenlinner*
Affiliation:
EADS Innovation Works, Willy-Messerschmitt-Strasse 1, 85521 Ottobrunn, Germany.
Armin Stehle
Affiliation:
EADS Cassidian Electronics, Woerthstrasse 85, 89077 Ulm, Germany.
Christian Siegel
Affiliation:
EPCOS AG, a TDK EPC Group Company, Anzingerstrasse 13, 81671 München, Germany.
William Gautier
Affiliation:
EADS Cassidian Electronics, Woerthstrasse 85, 89077 Ulm, Germany.
Benedikt Schulte
Affiliation:
EADS Innovation Works, Willy-Messerschmitt-Strasse 1, 85521 Ottobrunn, Germany.
Sascha Figur
Affiliation:
EADS Innovation Works, Willy-Messerschmitt-Strasse 1, 85521 Ottobrunn, Germany.
Ulrich Prechtel
Affiliation:
EADS Innovation Works, Willy-Messerschmitt-Strasse 1, 85521 Ottobrunn, Germany.
Volker Ziegler
Affiliation:
EADS Innovation Works, Willy-Messerschmitt-Strasse 1, 85521 Ottobrunn, Germany.
*
Corresponding author: B. Schoenlinner Email: bernhard.schoenlinner@eads.net
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Abstract

This paper gives an overview of the low-complexity radio frequency microelectromechanical systems (RF MEMS) switch concept and technology of EADS Innovation Works in Germany. Starting in 2003, a capacitive switch concept, which is unique in several aspects, was developed to address specific needs in the aeronautic and space. Thermally grown silicon oxide as dielectric layer, the silicon substrate as actuation electrode, and a conductive zone realized by ion implantation make the EADS RF MEMS switch a very simple, low-cost, and reliable approach. In this document, data on experimental investigations are presented, which demonstrate outstanding performance figures in terms of insertion loss, isolation, frequency range, bandwidth, RF-power handling, and robustness with respect to thermal load. Based on this concept, numerous different circuits in particular single-pole single-throws (SPSTs), single-pole multi-throws (SPMTs), tunable filters, phase shifters, and electronically steerable antennas between 6 and 100 GHz have been designed, fabricated, and characterized.

Keywords

Microelectromechanical systemsMicroelectromechanical devicesTunable circuits and devicesSwitchesMicrowave circuits
Type
Tutorial and Review Paper
Information
International Journal of Microwave and Wireless Technologies , Volume 3 , Special Issue 5: RF MEMS , October 2011 , pp. 499 - 508
Copyright
Copyright © Cambridge University Press and the European Microwave Association 2011

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References

REFERENCES

[1]http://www.radantmems.comGoogle Scholar
[2]http://www.memtronics.comGoogle Scholar
[3]Pillans, B.: “RF MEMS”, European Microwave Week 2010, in Workshop on System & Technology Aspects of Future Passive and Active Phased Array Radars, Paris, France, September 26–October 1, 2010.Google Scholar
[4]Muldavin, J.; Bozler, C.O.; Rabe, S.; Wyatt, P.W.; Keast, C.L.: Wafer-scale packaged RF microelectromechanical switches. IEEE Trans. Microw. Theory Tech., 56 (2) (2008), 522–529.CrossRefGoogle Scholar
[5]http://www.advantest.com/aac/News/053008_1.htmlGoogle Scholar
[6]Seki, T. et al. : RF-MEMS contact switch technology in OMRON, in 10th Int. Symp. on RF MEMS and RF Microsystems, MEMSWAVE 2009, Trento, Italy, Jul 6–8, 2009.Google Scholar
[7]http://www.xcomwireless.netGoogle Scholar
[8]http://www.wispry.comGoogle Scholar
[9]http://www.premiumpresse.de/lfoundry-collaborates-with-epcos-now-tdk-epc-corporation-PR824477.htmlGoogle Scholar
[10]Robert, P. et al. : Integrated RF-MEMS switch based on a combination of thermal and electrostatic actuation, in 12th Int. Conf. on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS, 2003, 1714–1717.Google Scholar
[11]Wunnicke, O. et al. : Small, low-ohmic RF MEMS switches with thin-film package, in MEMS 2011. Cancun, Mexico, January 23–27, 2011.CrossRefGoogle Scholar
[12]Siegel, C.; Ziegler, V.; Schoenlinner, B.; Prechtel, U.; Schumacher, H.: Simplified RF-MEMS switches using implanted conductors and thermal oxide, in 36th European Microwave Conf., Manchester, UK, September 10–15, 2006, pp. 1735–1738.CrossRefGoogle Scholar
[13]Nicollian, E.H.; Brews, J.R.: MOS (Metal Oxide Semiconductor) Physics and Technology, John Wiley & Sons, New York, Chichester, Brisbane, Toronto, Singapore, 1982.Google Scholar
[14]Stehle, A.; Georgiev, G.; Schoenlinner, B.; Prechtel, U.; Seidel, H.; Schmid, U.: Glass cap packaged high isolating Ka-band RF-MEMS switch. Galvanotechnik, 5 (2009), 1208–1210.Google Scholar
[15]Stehle, A. et al. : Low complexity RF-MEMS switch optimized for operation up to 120°C, in 37th European Microwave Conf., Munich, Germany, October 8–12, 2007, pp. 1229–1232.CrossRefGoogle Scholar
[16]Ziegler, V.; Gautier, W.; Stehle, A.; Schoenlinner, B.; Prechtel, U.: Challenges and opportunities for RF-MEMS in aeronautics and space – the EADS perspective, IEEE Radio Wireless Week, in 10th Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems, New Orleans, LA, USA, January 11–13, 2010.CrossRefGoogle Scholar
[17]Stehle, A. et al. : High-power handling capability of a low-complexity RF-MEMS switch in Ku-band. IEEE Microw. Electron. Lett., 43 (24) (2007), 1367–1368.CrossRefGoogle Scholar
[18]Stehle, A. et al. : RF-MEMS switch and phase shifter optimized for W-band, in 38th European Microwave Conf., Amsterdam, Netherlands, October 28–30, 2008, pp. 104–107.CrossRefGoogle Scholar
[19]Stehle, A. et al. : Glass cap packaged high isolating Ka-band RF MEMS switch, in 9th Int. Conf. on RF MEMS and RF Microsystems, Heraklion, Greece, June 2008.Google Scholar
[20]Stehle, A. et al. : High isolation Ka-band SPST RF-MEMS switch for radiometer, in German Microwave Conf., Hamburg, Germany, March 10–12, 2008, pp. 86–88.Google Scholar
[21]Ziegler, V. et al. : SP48 T module architecture and RF-MEMS multi-throw switches for a multi-beam antenna measurement set-up at K- and Ka-band, in 39th European Microwave Conf., Rome, Italy, September 28–October 2, 2009, pp. 1128–1131.Google Scholar
[22]Siegel, C.; Ziegler, V.; Schoenlinner, B.; Prechtel, U.; Schumacher, H.: RF-MEMS based 2-bit reflective phase shifter at X-band for reconfigurable reflect-array antennas, in 8th Int. Conf. on RF MEMS and RF Microsystems, Barcelona, Spain, June 26–29, 2007, pp. 165–168.Google Scholar
[23]Stehle, A. et al. : Broadband single-pole multithrow RF-MEMS switches for Ka-band, in German Microwave Conf., Munich, Germany, March 16–18, 2009.CrossRefGoogle Scholar
[24]Siegel, C.; Ziegler, V.; Prechtel, U.; Schoenlinner, B.; Schumacher, H.: Very low complexity RF-MEMS technology for wide range tunable microwave filters, in 35th European Microwave Conf., Paris, France, October 3–7, 2005.CrossRefGoogle Scholar
[25]Schulte, B.; Ziegler, V.; Schoenlinner, B.; Prechtel, U.; Schumacher, H.: RF-MEMS tunable evanescent mode cavity filter in LTCC technology at Ku-band, in 41st European Microwave Conf., Manchester, October 10–13, 2011, accepted for publication.Google Scholar
[26]Gautier, W.; Schoenlinner, B.; Ziegler, V.; Prechtel, U.; Menzel, W.: RF-MEMS fixed and tunable filters in silicon micro-machined technology. IEEE Trans. Microw. Theory Tech. submitted for publication.Google Scholar
[27]Siegel, C.; Ziegler, V.; Prechtel, U.; Schoenlinner, B.; Schumacher, H.: A Ka-band RF-MEMS phase shifter approach based on a novel dual-state microstrip line, in 37th European Microwave Conf., Munich, Germany, October 8–12, 2007, pp. 1221–1224.CrossRefGoogle Scholar
[28]Gautier, W. et al. : Hybrid integrated RF-MEMS phased array antenna at 10 GHz, in 38th European Microwave Conf., Amsterdam, Netherlands, October 28–30, 2008, pp. 139–142.CrossRefGoogle Scholar
[29]Schoenlinner, B.; Gautier, W.; Stehle, A.; Ziegler, V.; Prechtel, U.: RF MEMS based electronically steerable antennas for radar, communication, and security applications, in 5th ESA Workshop on Millimetre Wave Technology and Applications – 31st ESA Antenna Workshop, Noordwijk, Netherlands, May 18–20, 2009.Google Scholar
[30]Gautier, W.; Ziegler, V.; Stehle, A.; Schoenlinner, B.; Prechtel, U.; Menzel, W.: RF-MEMS phased array antenna on low-loss LTCC substrate for Ka-band data link, in 39th European Microwave Conf., Rome, Italy, September 28–October 2, 2009, pp. 914–917.CrossRefGoogle Scholar