Skip to main content
×
Home
    • Aa
    • Aa

OMCVD of thin films from metal diketonates and triphenylbismuth

  • A. D. Berry (a1), R. T. Holm (a1), M. Fatemi (a1) and D. K. Gaskill (a1)
Abstract

Films containing the metals copper, yttrium, calcium, strontium, barium, and bismuth were grown by organometallic chemical vapor deposition (OMCVD). Depositions were carried out at atmospheric pressure in an oxygen-rich environment using metal beta-diketonates and triphenylbismuth. The films were characterized by Auger electron spectroscopy, Nomarski and scanning electron microscopy, and x-ray diffraction. The results show that films containing yttrium consisted of Y2O3 with a small amount of carbidic carbon, those with copper and bismuth were mixtures of oxides with no detectable carbon, and those with calcium, strontium, and barium contained carbonates. Use of a partially fluorinated barium beta-diketonate gave films of BaF2 with small amounts of BaCO3.

Copyright
Linked references
Hide All

This list contains references from the content that can be linked to their source. For a full set of references and notes please see the PDF or HTML where available.

1H. Prakash , Prog. Cryst. Growth Charact. 6, 371 (1983).

2A. D. Berry , D. K. Gaskill , R.T. Holm , E. J. Cukauskas , R. Kaplan , and R. L. Henry , Appl. Phys. Lett. 52, 1743 (1988).

3A.D. Berry , R.T. Holm , E. J. Cukauskas , M. Fatemi , D. K. Gaskill , R. Kaplan , and W. B. Fox , J. Cryst. Growth 92, 344 (1988).

5K. J. Eisentraut and R. E. Sievers , J. Am. Chem. Soc. 87, 5254 (1965).

6E.W. Berg and N. M. Herrera , Anal. Chim. Acta 60, 117 (1972).

7R. Belcher , C. R. Cranley , J. R. Majer , W.I. Stephen , and P.C. Uden , Anal. Chim. Acta 60, 109 (1972).

9N. Matsubara and T. Kuwamoto , Inorg. Chem. 24, 2697 (1985) and references therein.

10J. E. Schwarberg , R. E. Sievers , and R.W. Moshier , Anal. Chem. 42, 1828 (1970).

11F.A. Houle , R. J. Wilson , and T. H. Baum , J. Vac. Sci. Technol. A4, 2452 (1986).

13A. B. Laurie and M. L. Norton , Mater. Res. Bull. 24, 213 (1989).

16C. Benndorf , B. Egert , G. Keller , and F. Thieme , Surf. Sci. 74, 216 (1978).

17C. Benndorf , B. Egert , G. Keller , H. Seidel , and F. Thieme , J. Phys. Chem. Solids 40, 877 (1979).

18C. Benndorf , H. Caus , B. Egert , H. Seidel , and F. Thieme , J. Electron Spectrosc. Relat. Phenom. 19, 77 (1980).

19K. Kamata , S. Matsumoto , and Y. Shibata , Yogyo-Kyokai-Shi 90, 46 (1982).

21J. M. Baker and J. L. McNatl , J. Vac. Sci. Technol. 9, 792 (1971).

22J. Onsgaard , Studies in Surf. Sci. Catalysis 9, 182 (1980).

25G.A. Haas , C.R. K. Marrian , and A. Shih , Appl. Surf. Sci. 16, 125 (1983).

26A. Shih , C. Hor , and G. A. Haas , Appl. Surf. Sci. 2, 112 (1979).

27A. Shih , C.R. K. Marrian , and G.A. Haas , Appl. Surf. Sci. 16, 106 (1983).

34A. J. A. Winnubst , P. J. M. Kroot , and A. J. Burggraaf , J. Phys. Chem. Solids 44, 955 (1983).

35T. N. Taylor , C.T. Campbell , J.W. Rogers , W. P. Ellis , and J. M. White , Surf. Sci. 134, 529 (1983).

37K. Shinohara , F. Munakata , and M. Yamanaka , Jpn. J. Appl. Phys. 27, L1683 (1988).

38J. Zhao , K-H. Dahmen , H. O. Marcy , L. M. Tonge , T. J. Marks , B.W. Wessels , and C.R. Kannewurf , Appl. Phys. Lett. 53, 1750 (1988).

39A. J. Panson , R. G. Charles , D. N. Schmidt , J. R. Szedon , G.J. Machiko , and A.I. Braginski , Appl. Phys. Lett. 53, 1756 (1988).

40A. P. Purdy , A. D. Berry , R.T. Holm , M. Fatemi , and D. K. Gaskill , Inorg. Chem. 28, 2799 (1989).

42D. Mueller , A. Shih , E. Roman , T. Madey , R. Kurtz , and R. Stockbauer , J. Vac. Sci. Technol. A6, 1067 (1988).

43R.E. Newnham , Rep. Prog. Phys. 52, 123 (1989).

44C.J. Brierley , C. Trundle , L. Considine , R.W. Whatmore , and F.W. Ainger , Ferroelectrics 91, 181 (1989).

45A. M. Glass , Science 235, 1003 (1987).

Recommend this journal

Email your librarian or administrator to recommend adding this journal to your organisation's collection.

Journal of Materials Research
  • ISSN: 0884-2914
  • EISSN: 2044-5326
  • URL: /core/journals/journal-of-materials-research
Please enter your name
Please enter a valid email address
Who would you like to send this to? *
×