Skip to main content
    • Aa
    • Aa

Two interferometric methods for the mechanical characterization of thin films by bulging tests. Application to single crystal of silicon

  • E. Bonnotte (a1), P. Delobelle (a1), L. Bornier (a1), B. Trolard (a2) and G. Tribillon (a2)...

Two optical methods are presented for the mechanical characterization of thin films, namely real time holographic interferometry and a fringe projection method called “contouring.” These two methods are coupled to the interferometry by the phase measurements, thus allowing the displacement field to be measured at all points on the membrane. We discuss the solutions retained in terms of their precision and sensitivity. These methods are then applied to membrane bulging tests, a type of test that is widely used in micro-mechanical studies. The measurements are performed on silicon single crystal and the results are compared to the solutions calculated by finite element methods. In both cases, the good agreement between theory and experiments allows the experimental apparatus to be validated.

Hide All
1. Recherches en microtechniques: réalités et perspectives, Collection du livre vert (Institut des Microtechniques et Cetehor, Janvier 1992).
2.Minotti P. and Bonnotte E., “Un aperçu des problèmes posés par la conception des microactionneurs”, Les Entretiens de la Technologie, 3ême Edition, 15–16 mars (Paris, 1994).
3.Tabata O., Kawabata K., Sugiyama S., and Igarashi I., Sens. Actuators 20 135 (1989).
4.Lin P. and Senturia S. D., in Thin Films: Stresses and Mechanical Properties II, edited by Doerner M., Oliver W. C., Pharr G. M., and Brotzen F. R. (Mater. Res. Soc. Symp. Proc. 188, Pittsburgh, PA, 1990), p. 41.
5.Small K. M. and Nix W. D., J. Mater. Res. 7, 1553 (1992).
6.Vlassak J. J. and Nix W. D., J. Mater. Res. 7, 3242 (1992).
7.Tribillon G., Trolard B., Delobelle P., Bonnotte E., and Bornier L., European Symp. on Optics for Prod. in Manufacturing (Stuttgart, 20–24 June 1994).
8.Hardwick D. A., Thin Solid Films 153, 109 (1987).
9.Doerner M. F. and Nix W. D., CRC Crit. Rev. Solid State Mater. Sci. 14, 225 (1988).
10.Vest C. M., Holography Interferometry (Wiley and Sons, New York, 1979).
11.Smigielski P., Holographie Industrielle (Teknea, 1994).
12.Chambard J. P., Le traitement des images interférométriques, Holo 3 (Tours, Novembre 1994).
13.De Groot P., European Symp. on Optics for Prod. in Manufacturing (Stuttgart, 20–24 June 1994).
14.Schwider J., Falkenstorfer O., Schreiber H., Zoller A., and Streibl N., Opt. Eng. 32, 1883 (1983).
15.Hariharan P., Oreb B. F., and Eiju T., Appl. Opt. 26, 2504 (1987).
16.Brophy C. P., J. Opt. Soc. Am. 7, 537 (1990).
17.Trolard B., Thèse Université de Franche-Comté (Besançon, 1996).
18.Bonnotte E., “Etude des propriétés mécaniques des films minces. Application au silicium monocristallin”, Thèse Université de Franche-Comté (Besançon, 1994).
19.Timoshenko S. and Woinowsky-Krieger S., Théorie des plaques et coques, Librairie Polytechnique (1961).
20.Brantley W. A., J. Appl. Phys. 44, 534 (1973).
21.Manceau J. F., Robert L., Bastien F., Oytana C., and Biwersi S., J. Micro Electromechanical Systems 5, 4, 243249 (1996).
22.Jaccodine R. J. and Schlegel W. A., J. Appl. Phys. 37, 2429 (1966).
23.Stoney G. G., Proc. Roy. Soc. London Sci. A 82, 172 (1909).
24.Röll K., J. Appl. Phys. 47, 3224 (1976).
25.Jou J. H. and Li Hsu, J. Appl. Phys. 69, 1384 (1991).
26.Timoshenko S., Théorie de la stabilité élastique, Librairie Polytechnique (1947).
27.Ambrée P., Kreller F., Wolf R., and Wandel K., J. Vac. Sci. Technol. B11 (3), 614 (1993).
28.Bonnotte E., Robert L., Delobelle P., Bornier L., Trolard B., Tribillon G., and Mairey D., EUROPTO Series, SPIE 2782, 685 (1996).
Recommend this journal

Email your librarian or administrator to recommend adding this journal to your organisation's collection.

Journal of Materials Research
  • ISSN: 0884-2914
  • EISSN: 2044-5326
  • URL: /core/journals/journal-of-materials-research
Please enter your name
Please enter a valid email address
Who would you like to send this to? *


Full text views

Total number of HTML views: 0
Total number of PDF views: 8 *
Loading metrics...

Abstract views

Total abstract views: 64 *
Loading metrics...

* Views captured on Cambridge Core between September 2016 - 22nd October 2017. This data will be updated every 24 hours.