3 results
Particulate growth in a 13.56 MHz radiofrequency methane plasma: influence of the flow rate and the incident rf power
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- Journal:
- The European Physical Journal - Applied Physics / Volume 14 / Issue 3 / June 2001
- Published online by Cambridge University Press:
- 15 June 2001, pp. 187-192
- Print publication:
- June 2001
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Influence of particulates generated in a CH4 low pressure radiofrequency discharge on dc negative self bias voltage
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- Journal:
- The European Physical Journal - Applied Physics / Volume 11 / Issue 1 / July 2000
- Published online by Cambridge University Press:
- 15 July 2000, pp. 71-76
- Print publication:
- July 2000
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Analysis of particulates generated in a radiofrequency methane plasma by laser light scattering and optical spectroscopy
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- Journal:
- The European Physical Journal - Applied Physics / Volume 8 / Issue 1 / October 1999
- Published online by Cambridge University Press:
- 15 October 1999, pp. 53-59
- Print publication:
- October 1999
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