8 results
Low Bias Dry Etching of Sic and Sicn in ICP NF3 Discharges
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- Journal:
- MRS Online Proceedings Library Archive / Volume 512 / 1998
- Published online by Cambridge University Press:
- 10 February 2011, 507
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- 1998
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Icp Etching Of SiC
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- Journal:
- MRS Online Proceedings Library Archive / Volume 483 / 1997
- Published online by Cambridge University Press:
- 10 February 2011, 177
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- 1997
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Microporous SiO2/Vycor membranes for gas separation
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- Journal:
- Journal of Materials Research / Volume 11 / Issue 12 / December 1996
- Published online by Cambridge University Press:
- 31 January 2011, pp. 3164-3173
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- December 1996
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Low pressure chemical vapor deposition of silicon nitride using the environmentally friendly tris(dimethylamino)silane precursor
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- Journal:
- Journal of Materials Research / Volume 11 / Issue 6 / June 1996
- Published online by Cambridge University Press:
- 31 January 2011, pp. 1483-1488
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- June 1996
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Electron Cyclotron Resonance Etching of SiC in SF6/O2 and NF3 /O2 Plasmas
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- Journal:
- MRS Online Proceedings Library Archive / Volume 421 / 1996
- Published online by Cambridge University Press:
- 10 February 2011, 251
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- 1996
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Physical Properties of Diamond-Like Nanocomposite Films
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- Journal:
- MRS Online Proceedings Library Archive / Volume 351 / 1994
- Published online by Cambridge University Press:
- 15 February 2011, 43
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- 1994
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Plasma Enhanced Chemical Vapor Deposition of Silicon Nitride from Novel Organosilanes
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- Journal:
- MRS Online Proceedings Library Archive / Volume 344 / 1994
- Published online by Cambridge University Press:
- 15 February 2011, 241
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- 1994
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