3 results
Subcritical Crack Growth in Single-crystal Silicon Using Micromachined Specimens
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- Journal:
- Journal of Materials Research / Volume 17 / Issue 3 / March 2002
- Published online by Cambridge University Press:
- 31 January 2011, pp. 683-692
- Print publication:
- March 2002
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High-Resolution Measurement of Crack Growth in Micro-Machined Crystal Silicon
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- Journal:
- MRS Online Proceedings Library Archive / Volume 605 / 1999
- Published online by Cambridge University Press:
- 10 February 2011, 43
- Print publication:
- 1999
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Observations of Low Cycle Fatigue of Al Thin Films for Mems Applications
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- Journal:
- MRS Online Proceedings Library Archive / Volume 518 / 1998
- Published online by Cambridge University Press:
- 10 February 2011, 81
- Print publication:
- 1998
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