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Coarse-Grained Molecular Dynamics Simulation of Epoxy-Based Chemically-Amplified Resist for MEMS Application
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1415 / 2012
- Published online by Cambridge University Press:
- 07 February 2012, mrsf11-1415-tt05-14
- Print publication:
- 2012
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- Article
- Export citation