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Coarse-Grained Molecular Dynamics Simulation of Epoxy-Based Chemically-Amplified Resist for MEMS Application

  • Hiromasa Yagyu (a1), Yoshikazu Hirai (a2), Akio Uesugi (a2), Yoshihide Makino (a2), Koji Sugano (a2), Toshiyuki Tsuchiya (a2) and Osamu Tabata (a2)...

A unique simulation method of epoxy-based chemically-amplified resist by coarse-grained molecular dynamics was proposed. The mechanical properties of an epoxy-based chemically-amplified resists with various cross-linking ratios were simulated using a newly developed coarse-grained molecular dynamics simulation that employs a bead-spring model. Models with the different cross-linking ratios were created in the molecular dynamics calculation step and uniaxial elongation simulations were performed. The results reveal that the simulated elastic modulus of the resist modeled by the bead-spring model with an extended angle bending potential depends on the cross-linking ratio; its dependency exhibits good agreement with that determined by nanoindentation tests.

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1. Y. Hirai , K. Sugano , T. Tsuchiya and O. Tabata , J. Microelectromech. Syst. 19, 1058 (2010).

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MRS Online Proceedings Library (OPL)
  • ISSN: -
  • EISSN: 1946-4274
  • URL: /core/journals/mrs-online-proceedings-library-archive
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