Skip to main content
×
Home
    • Aa
    • Aa

Coarse-Grained Molecular Dynamics Simulation of Epoxy-Based Chemically-Amplified Resist for MEMS Application

  • Hiromasa Yagyu (a1), Yoshikazu Hirai (a2), Akio Uesugi (a2), Yoshihide Makino (a2), Koji Sugano (a2), Toshiyuki Tsuchiya (a2) and Osamu Tabata (a2)...
Abstract
ABSTRACT

A unique simulation method of epoxy-based chemically-amplified resist by coarse-grained molecular dynamics was proposed. The mechanical properties of an epoxy-based chemically-amplified resists with various cross-linking ratios were simulated using a newly developed coarse-grained molecular dynamics simulation that employs a bead-spring model. Models with the different cross-linking ratios were created in the molecular dynamics calculation step and uniaxial elongation simulations were performed. The results reveal that the simulated elastic modulus of the resist modeled by the bead-spring model with an extended angle bending potential depends on the cross-linking ratio; its dependency exhibits good agreement with that determined by nanoindentation tests.

Copyright
Linked references
Hide All

This list contains references from the content that can be linked to their source. For a full set of references and notes please see the PDF or HTML where available.

1. Y. Hirai , K. Sugano , T. Tsuchiya and O. Tabata , J. Microelectromech. Syst. 19, 1058 (2010).

3. K. Kremer and G. S. Grest , J. Chem. Phys. 92, 5057 (1990).

4. T. Aoyagi , F. Sawa , T. Shoji , H. Fukunaga , J. Takimoto and M. Doi , Comput. Phys. Commun. 145, 2676 (2002).

5. H. Lorenz , M. Despont , N. Fahmi , N. LaBianca , P. Renaud and P. Vettiger , J. Micromech. Microeng. 7, 121 (1997).

6. K. Misumi , K. Saito , A. Yamanouchi , T. Senzaki and H. J. Honma , Photopolym. Sci. Technol. 19, 57 (2006).

7. H. Yagyu and T. Utsumi , Comput. Mater. Sci. 46, 286 (2009).

9. C. Luo , T. W. Schneider , R. C. White , J. Currie and M. Paranjape , J. Micromech. Microeng. 13, 129 (2003).

Recommend this journal

Email your librarian or administrator to recommend adding this journal to your organisation's collection.

MRS Online Proceedings Library (OPL)
  • ISSN: -
  • EISSN: 1946-4274
  • URL: /core/journals/mrs-online-proceedings-library-archive
Please enter your name
Please enter a valid email address
Who would you like to send this to? *
×

Keywords:

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 3 *
Loading metrics...

Abstract views

Total abstract views: 111 *
Loading metrics...

* Views captured on Cambridge Core between September 2016 - 24th July 2017. This data will be updated every 24 hours.