6 results
Pyrometric Emissivity Measurements and Compensation in an RTP Chamber
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- Journal:
- MRS Online Proceedings Library Archive / Volume 146 / 1989
- Published online by Cambridge University Press:
- 25 February 2011, 461
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- 1989
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In-Situ Processing of Silicon Dielectrics by Rapid Thermal Processing: Cleaning, Growth, and Annealing
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- Journal:
- MRS Online Proceedings Library Archive / Volume 92 / 1987
- Published online by Cambridge University Press:
- 28 February 2011, 141
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- 1987
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Rapid Thermal Processing of Gate Dielectric Films and their Characterization
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- Journal:
- MRS Online Proceedings Library Archive / Volume 92 / 1987
- Published online by Cambridge University Press:
- 28 February 2011, 127
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- 1987
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Development Trends in The Direction of Rapid Isothermal Processing (Rip) Dominated Silicon Integrated Circuit Fabrication
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- Journal:
- MRS Online Proceedings Library Archive / Volume 71 / 1986
- Published online by Cambridge University Press:
- 28 February 2011, 441
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- 1986
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Material and Electrical Properties of Gate Dielectrics Grown by Rapid Thermal Processing
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- MRS Online Proceedings Library Archive / Volume 52 / 1985
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- 26 February 2011, 341
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- 1985
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Characterization of PSG Films Reflowed in Steam Using Rapid Thermal Processing
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- Journal:
- MRS Online Proceedings Library Archive / Volume 52 / 1985
- Published online by Cambridge University Press:
- 26 February 2011, 233
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- 1985
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