10 results
Pioneering Application of Corona Charge-Kelvin Probe Metrology to Noncontact Characterization of In0.53 Ga0.47 As/Al2O3/HfO2 Stack
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 1691 / 2014
- Published online by Cambridge University Press:
- 24 July 2014, mrss14-1691-bb05-02
- Print publication:
- 2014
-
- Article
- Export citation
Non-contact Corona-Kelvin based Metrology for High-k Dielectric Characterization with an Extension to Micro-Scale Measurement
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 917 / 2006
- Published online by Cambridge University Press:
- 01 February 2011, 0917-E09-01
- Print publication:
- 2006
-
- Article
- Export citation
Non-Contact Mapping of Fe Contamination in Oxidized Si Wafers with Sensitivity in Part-Per-Trillion Range
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 428 / 1996
- Published online by Cambridge University Press:
- 15 February 2011, 449
- Print publication:
- 1996
-
- Article
- Export citation
Ultrasound Defect Engineering of Transition Metals Via Metal-Acceptor Pairs in Silicon
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 378 / 1995
- Published online by Cambridge University Press:
- 26 February 2011, 647
- Print publication:
- 1995
-
- Article
- Export citation
Contamination Monitoring Using Surface Photovoltage and Application to Process Line Control
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 354 / 1994
- Published online by Cambridge University Press:
- 21 February 2011, 405
- Print publication:
- 1994
-
- Article
- Export citation
Porous Silicon Luminescence Study by Imaging Methods: Relationship to Pore Dimensions
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 332 / 1994
- Published online by Cambridge University Press:
- 21 February 2011, 201
- Print publication:
- 1994
-
- Article
- Export citation
A Lifetime Study of Oxygen Agglomeration Induced Defects in Cz Silicon Crystal by Surface Photovoltage (SPV)
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 262 / 1992
- Published online by Cambridge University Press:
- 03 September 2012, 677
- Print publication:
- 1992
-
- Article
- Export citation
Non-Contact, No Wafer Preparation Deep Level Transient Spectroscopy (DlTS) Based on Surface Photovoltage (SPV)
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 261 / 1992
- Published online by Cambridge University Press:
- 22 February 2011, 217
- Print publication:
- 1992
-
- Article
- Export citation
Surface Charge Imaging in Semiconductor Wafers by Surface Photovoltage (SPV)
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 261 / 1992
- Published online by Cambridge University Press:
- 22 February 2011, 223
- Print publication:
- 1992
-
- Article
- Export citation
Non-Contact, Wafer-Scale Deep Level Transient Spectroscopy (DLTS) Based on Surface Photovoltage (SPV)
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 240 / 1991
- Published online by Cambridge University Press:
- 26 February 2011, 129
- Print publication:
- 1991
-
- Article
- Export citation