9 results
“Equilibrium Oxide” Features of the SIMOX Process
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- Journal:
- MRS Online Proceedings Library Archive / Volume 235 / 1991
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- 28 February 2011, 159
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- 1991
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Evolution of Buried Oxide “Pipe” Defects Upon Implantation Through Particles in Simox Material
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- MRS Online Proceedings Library Archive / Volume 235 / 1991
- Published online by Cambridge University Press:
- 28 February 2011, 153
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- 1991
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Effect of Intermediate Thermal Processing on Microstructural Changes of Oxygen Implanted Silicon-on-Insulator Material
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- Journal:
- MRS Online Proceedings Library Archive / Volume 235 / 1991
- Published online by Cambridge University Press:
- 28 February 2011, 133
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- 1991
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Structural characterization of damage in Si(100) produced by MeV Si+ ion implantation and annealing
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- Journal of Materials Research / Volume 5 / Issue 2 / February 1990
- Published online by Cambridge University Press:
- 31 January 2011, pp. 352-359
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- February 1990
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Shallow Junction Formation in As-Implanted Si by Low-Temperature Rapid Thermal Annealing
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- Journal:
- MRS Online Proceedings Library Archive / Volume 147 / 1989
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- 21 February 2011, 19
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- 1989
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Damage Growth in Si During Self-Ion Irradiation: a Study of Ion Effects Over an Extended Energy Range
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- MRS Online Proceedings Library Archive / Volume 147 / 1989
- Published online by Cambridge University Press:
- 21 February 2011, 169
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- 1989
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Damage Formation in Semiconductors During Mev Ion Implantation
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- MRS Online Proceedings Library Archive / Volume 128 / 1988
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- 25 February 2011, 593
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- 1988
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Cavity Formation in Simox Structures
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- Journal:
- MRS Online Proceedings Library Archive / Volume 107 / 1987
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- 28 February 2011, 79
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- 1987
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Characterization and Evolution of Microstructures Formed by High Dose Oxygen Implantation of silicont
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- Journal:
- MRS Online Proceedings Library Archive / Volume 74 / 1986
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- 28 February 2011, 591
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- 1986
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