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Study of layered diamond like carbon and PECVD fluorocarbon films for ultra low dielectric constant interlayer dielectric applications
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- Journal:
- Journal of Materials Research / Volume 31 / Issue 8 / 28 April 2016
- Published online by Cambridge University Press:
- 21 March 2016, pp. 1027-1037
- Print publication:
- 28 April 2016
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- Article
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