7 results
Thickness-Dependant Electrical Characteristics of Nitrogen-Doped Polycrystalline 3C-SiC Thin Films Deposited by LPCVD
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1222 / 2009
- Published online by Cambridge University Press:
- 31 January 2011, 1222-DD02-33
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- 2009
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Mechanical Properties and Morphology of Polycrystalline 3C-SiC Films Deposited on Si and SiO2 by LPCVD
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- Journal:
- MRS Online Proceedings Library Archive / Volume 795 / 2003
- Published online by Cambridge University Press:
- 01 February 2011, U11.3
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- 2003
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Surface Micromachining: A Brief Introduction
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- Journal:
- MRS Bulletin / Volume 26 / Issue 4 / April 2001
- Published online by Cambridge University Press:
- 31 January 2011, pp. 289-290
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- April 2001
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A Novel Method of Fabricating SiC-On-Insulator Substrates for Use in MEMS
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- Journal:
- MRS Online Proceedings Library Archive / Volume 681 / 2001
- Published online by Cambridge University Press:
- 21 March 2011, I5.16
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- 2001
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Micromachining Techniques for Advanced SiC MEMS
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- Journal:
- MRS Online Proceedings Library Archive / Volume 640 / 2000
- Published online by Cambridge University Press:
- 21 March 2011, H4.3
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- 2000
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Characterization of polycrystalline silicon carbide films grown by atmospheric pressure chemical vapor deposition on polycrystalline silicon
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- Journal:
- Journal of Materials Research / Volume 13 / Issue 2 / February 1998
- Published online by Cambridge University Press:
- 31 January 2011, pp. 406-412
- Print publication:
- February 1998
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Finite-Element Modeling of Residual Stress in SiC Diaphragms
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- Journal:
- MRS Online Proceedings Library Archive / Volume 518 / 1998
- Published online by Cambridge University Press:
- 10 February 2011, 221
- Print publication:
- 1998
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