2 results
A correlation of capacitive RF-MEMS reliability to AlN dielectric film spontaneous polarization
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- Journal:
- International Journal of Microwave and Wireless Technologies / Volume 1 / Issue 1 / February 2009
- Published online by Cambridge University Press:
- 19 March 2009, pp. 43-47
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Dielectric Charging in Low Temperature Silicon Nitride for RF-MEMS Capacitive Switches
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1075 / 2008
- Published online by Cambridge University Press:
- 01 February 2011, 1075-J05-05
- Print publication:
- 2008
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