Book contents
- Frontmatter
- Contents
- List of contributors
- Preface
- Abstracts of chapters
- 1 Overview of sputter-deposited TiNi based thin films
- 2 Martensitic transformation in TiNi alloys
- 3 Deposition techniques for TiNi thin film
- 4 TiNi multilayer thin films
- 5 Crystallization and microstructural development
- 6 Mechanical properties of TiNi thin films
- 7 Stress and surface morphology evolution
- 8 Ion implantation processing and associated irradiation effects
- 9 Laser post-annealing and theory
- 10 Overview of thin film shape memory alloy applications
- 11 Theory of SMA thin films for microactuators and micropumps
- 12 Binary and ternary alloy film diaphragm microactuators
- 13 TiNi thin film devices
- 14 Shape memory microvalves
- 15 Superelastic thin films and applications for medical devices
- 16 Fabrication and characterization of sputter-deposited TiNi superelastic microtubes
- 17 Thin film shape memory microcage for biological applications
- 18 Shape memory thin film composite microactuators
- 19 TiNi thin film shape memory alloys for optical sensing applications
- Index
10 - Overview of thin film shape memory alloy applications
Published online by Cambridge University Press: 23 February 2010
- Frontmatter
- Contents
- List of contributors
- Preface
- Abstracts of chapters
- 1 Overview of sputter-deposited TiNi based thin films
- 2 Martensitic transformation in TiNi alloys
- 3 Deposition techniques for TiNi thin film
- 4 TiNi multilayer thin films
- 5 Crystallization and microstructural development
- 6 Mechanical properties of TiNi thin films
- 7 Stress and surface morphology evolution
- 8 Ion implantation processing and associated irradiation effects
- 9 Laser post-annealing and theory
- 10 Overview of thin film shape memory alloy applications
- 11 Theory of SMA thin films for microactuators and micropumps
- 12 Binary and ternary alloy film diaphragm microactuators
- 13 TiNi thin film devices
- 14 Shape memory microvalves
- 15 Superelastic thin films and applications for medical devices
- 16 Fabrication and characterization of sputter-deposited TiNi superelastic microtubes
- 17 Thin film shape memory microcage for biological applications
- 18 Shape memory thin film composite microactuators
- 19 TiNi thin film shape memory alloys for optical sensing applications
- Index
Summary
Abstract
This chapter discusses properties affecting thin film applications and resulting devices that have been developed since sputtered TiNi thin film with shape memory properties was first demonstrated in 1989. As the shape memory alloy technology has matured, the material has gradually gained acceptance. TiNi thin film shape memory alloy (SMA) exhibits intrinsic characteristics similar to bulk nitinol: large stress and strain, long fatigue life, biocompatibility, high resistance to chemical corrosion, and electrical properties that are well matched to joule heating applications. In addition, thin film dissipates heat rapidly so that it can be thermally cycled in milliseconds. These properties make TiNi thin film useful in making microactuators. Microelectromechanical (MEMS) processes – specifically photolithography, chemical etching, and use of sacrificial layers to fabricate complex microstructures – combine TiNi thin film with silicon to provide a versatile platform for fabrication of microdevices. A variety of microdevices have been developed in several laboratories, including valves, pumps, optical and electrical switches and intravascular devices.
Interest in thin film applications is increasing as evidenced by the number of recent publications and patents issued. Intravascular medical devices are currently in clinical trials. The future for thin film devices, especially in medical devices, seems assured despite the fact that to this day no “killer application” has emerged.
Introduction to TiNi thin film applications
This chapter provides an overview of shape memory alloy thin film applications since TiNi thin film, developed with support from a National Aeronautics and Space Administration Small Business Innovation Research contract, was introduced at the Engineering Aspects of Shape Memory Alloy Conference in Lansing, MI in 1989.
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- Chapter
- Information
- Thin Film Shape Memory AlloysFundamentals and Device Applications, pp. 261 - 274Publisher: Cambridge University PressPrint publication year: 2009
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