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Basic Studies of Multi-Layer Thin Film Analysis Using Fundamental Parameter Method

Published online by Cambridge University Press:  06 March 2019

Y. Kataoka  and
T. Arai
Y. Kataoka
Affiliation:
Rigaku Industrial Corporation Osaka, Japan
T. Arai
Affiliation:
Rigaku Industrial Corporation Osaka, Japan
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Extract

X-ray fluorescence analysis is the most suitable method, for the characterization of the thickness and the chemical composition of thin film samples. It is non-destructive, rapid, precise, and accurate for both metal and oxide samples.

Type
Research Article
Information
Advances in X-Ray Analysis , Volume 33: Thirty-Eighth Annual Conference on Applications of X-ray Analysis, July 31 - August 4, 1989 , 1989 , pp. 213 - 223
Copyright
Copyright © International Centre for Diffraction Data 1989

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