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Least-Squares Refinement of X-ray Reflectivity Data Obtained with a Conventional Powder Diffractometer

Published online by Cambridge University Press:  06 March 2019

R. Gilles ,
G. Will ,
F. Elf  and
T. C. Huang
R. Gilles
Affiliation:
Mineralogical Institute, University Bonn Poppeldorfer Schloβ, 53115 Bonn, Germany
G. Will
Affiliation:
Mineralogical Institute, University Bonn Poppeldorfer Schloβ, 53115 Bonn, Germany
F. Elf
Affiliation:
Mineralogical Institute, University Bonn Poppeldorfer Schloβ, 53115 Bonn, Germany
T. C. Huang
Affiliation:
IBM Research Division, Almaden Research Center, 650 Harry Road San Jose, CA 95120-6099
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Abstract

Results on least-squares refinement of X-ray reflectivity data obtained with a conventional powder diffractometer are reported. A model containing an oxygen contaminated surface on Pt was used to refine experimental data for a “500-Å” Pt film on Si. Values of layer thickness, density, and roughness determined by least-squares refinement agree with those obtained from highresolution reflectivity data. The results were found to be insensitive to the film-surface alignment. An agreement of ±2.3 Å for Pt thickness, 8% for density, and 2.5 Å for roughness was obtained when the surface was aligned to within the divergence of the incident X-ray beam. The least-squares refinement method was also used to analyze two sputtered “300-Å” Pt films deposited at 4 and 20 × 10-6 Torr Ar pressure. Results showed a significant increase in Pt thickness and a decrease in density for the 20 × 10-6 film probably caused by a large amount of Ar trapped in the film.

Type
III. Applications of Diffraction to Semiconductors and Films
Information
Advances in X-Ray Analysis , Volume 38: Forty-third Annual Conference on Applications of X-ray Analysis , 1994 , pp. 145 - 150
Copyright
Copyright © International Centre for Diffraction Data 1994

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References

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