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X-ray Fourier transform holography using separated holography-mask

Published online by Cambridge University Press:  01 November 2010

N. Awaji ,
K. Nomura ,
S. Doi ,
S. Isogami ,
M. Tsunoda ,
K. Kodama ,
M. Suzuki  and
T. Nakamura
N. Awaji*
Affiliation:
Device Integration Technologies Laboratory, Fujitsu Ltd. and Fujitsu Laboratories Ltd., Atsugi, Kanagawa 243-0197, Japan
K. Nomura
Affiliation:
Device Integration Technologies Laboratory, Fujitsu Ltd. and Fujitsu Laboratories Ltd., Atsugi, Kanagawa 243-0197, Japan
S. Doi
Affiliation:
Device Integration Technologies Laboratory, Fujitsu Ltd. and Fujitsu Laboratories Ltd., Atsugi, Kanagawa 243-0197, Japan
S. Isogami
Affiliation:
Department of Electronic Engineering, Tohoku University, Sendai 980-8579, Japan
M. Tsunoda
Affiliation:
Department of Electronic Engineering, Tohoku University, Sendai 980-8579, Japan
K. Kodama
Affiliation:
JASRI/SPring-8, Sayo, Hyogo 679-5198, Japan
M. Suzuki
Affiliation:
JASRI/SPring-8, Sayo, Hyogo 679-5198, Japan
T. Nakamura
Affiliation:
JASRI/SPring-8, Sayo, Hyogo 679-5198, Japan
*
†Email address for correspondence:awaji.naoki@jp.fujitsu.com
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Abstract

We studied X-ray Fourier transform holography using separated holography-mask and sample geometry. The method was successfully applied to the imaging of the magnetic nanostructure using soft X-ray in addition to the cross-sectional imaging of Cu interconnect lines using hard X-ray.

Type
Contributed paper
Information
Diamond Light Source Proceedings , Volume 1 , Issue SRMS-7 , October 2010 , e113
Copyright
Copyright © Diamond Light Source Ltd 2010

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References

REFERENCES

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