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Nanometer positioning accuracy over a long term traveling stagebased on heterodyne interferometry

Published online by Cambridge University Press:  14 November 2012

I. Naeim  and
S. Khodier
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Abstract

In order to achieve nanometer accuracy, metrologists need to identify the sources oferror and develop solutions to eradicate or minimize their effects. A stabilized low powerdual-frequency laser heterodyne interferometer (ZMI-1000A) designed to measure linear andangular displacement with nominal measurement resolution 1.24 nm and 0.0025 arcsec,respectively, is used to achieve measurement of displacements over different travellingaxes by comparison with the electronically reference measurements of the stage over widerange 500 mm. The repeatability and reversal error of linear stage over the workingdistance have agreed opto-electronically and the positioning uncertainty been reduced. Amultivariable framework was implemented for the x-axis due to the crosscoupling between the forward and backward course of the linear stage. Thermal errorreduction is achieved using environmental temperature control (20 ± 0.2 °C)to help reduce thermal errors.

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Type
Research Article
Information
International Journal of Metrology and Quality Engineering , Volume 3 , Issue 2 , 2012 , pp. 97 - 100
Copyright
© EDP Sciences 2012

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References

Dennis, A.S., Length, dimensional measurements at NIST, J. Res. Natl. Inst. Stan. 106, 1–23 (2001) Google Scholar
Huang, P.S., Ni, J., On-line error compensation of coordinate measuring machines, Int. J. Mach. Tools Manuf. 35, 725–738 (1995) CrossRefGoogle Scholar
Fan, K.C., Chen, M.J., Huang, W.M., A six-degree-of-freedom measurement system for the motion accuracy of linear stage, Int. J. Mach. Tools Manuf. 38, 155–164 (1998) CrossRefGoogle Scholar
Hosoe, Shigeru, High precise and stable displacement-measuring laser interferometer with differential optical paths, Precis. Eng. 17, 258–265 (1995) CrossRefGoogle Scholar
Yim, Noh-Bin, Eom, Cheon II, kim, Seung-Woo, Dual-mode phase measurement for optical heterodyne interferometery, Meas. Sci. Technol. 11, 1131–1137 (2000) CrossRefGoogle Scholar
S. Wetzels, Laser based displacement calibration with nanometer accuracy, Ph.D. thesis, TUE, Eindhoven, The Netherlands, 1998
Demarest, F.C., High-resolution, high-speed, low data age uncertainty, heterodyne displacement measuring interferometer electronics, Meas. Sci. Technol. 9, 1024–1030 (1998) CrossRefGoogle Scholar
ZMI-1000A Operating manual, ZYGO Corporation, Middlefield, 1999
S.G. Rabinovich, Measurement Errors and Uncertainties, 3rd edn. (Springer, New York, 2005)
Bahrawi, M., Fareed, N., Application of a commercially available displacement measuring interferometer to line scale measurement and uncertainty of measurement, Mapan-JMSI 25, 261–266 (2010) Google Scholar
Sacconi, A., Picotto, G.B., Pasin, W., The IMGC calibration setup for micro-displacement actuators, IEEE Trans. Instrum. Meas. 48, 483–487 (1999) CrossRefGoogle Scholar
J.M. Gorniak, Design and Metrology of a Precision XY Planar Stage, Master of Applied Science in Mechanical Eng., Waterloo, Ontario, Canada, 2010