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Application of laser driven fast high density plasma blocks for ion implantation

  • AMIR H. SARI (a1), F. OSMAN (a2), K.R. DOOLAN (a2), M. GHORANNEVISS (a1), H. HORA (a3), R. HÖPFL (a4), G. BENSTETTER (a4) and M.H. HANTEHZADEH (a1)...

The measurement of very narrow high density plasma blocks of high ion energy from targets irradiated with ps-TW laser pulses based on a new skin depth interaction process is an ideal tool for application of ion implantation in materials, especially of silicon, GaAs, or conducting polymers, for micro-electronics as well as for low cost solar cells. A further application is for ion sources in accelerators with most specifications of many orders of magnitudes advances against classical ion sources. We report on near band gap generation of defects by implantation of ions as measured by optical absorption spectra. A further connection is given for studying the particle beam transforming of n-type semiconductors into p-type and vice versa as known from sub-threshold particle beams. The advantage consists in the use of avoiding aggressive or rare chemical materials when using the beam techniques for industrial applications.

Corresponding author
Address correspondence and reprint requests to: Heinrich Hora, Department of Theoretical Physics, University of New South Wales, P.O. Box 343, Connesl Point 2221, Sydney, Australia. E-mail:
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Bauer, D. (2003). Plasma formation through field ionization intense laser-matter interaction. Laser Part. Beams 21, 489495.
Badziak, J., Kozlov, A.A., Makowski, J., Parys, P., Ryc, L., Wolowski, J., Woryna, E. & Vankov, A.B. (1999). Investigations of ion streams emitted from plasma produced with high-power picosecond laser. Laser Part. Beams 17, 323329.
Badziak, J., Glowacz, S.G., Jablonski, S., Parys, P., Wolowski, J. & Hora, H. (2004a). Production of ultrahigh-current-density ion beams by short-pulse skin-layer laser-plasma interaction. Appl. Phys. Lett. 85, 30423047.
Badziak, J., Glowacz, S., Jablonski, S., Paris, P., Wolowski, J., Kraska, J., Laska, L., Rohlena, K. & Hora, H. (2004b). Production of ultrahigh ion current densities at Akin-Layer subrelativistic laser-plasma interaction. Plasma Phys. Contr. Fusion 46, B541B555.
Badziak, J., Glowacz, S., Jablonski, S., Parys, P., Wolowski, J. & Hora, H. (2005). Laser driven generation of high-current ion beams using skin-layer ponderomotive acceleration. Laser Part. Beams 23, 401409.
Balmer, J.A. (1971). Self-focusing of laser beams in plasmas. Phys. Fluids 14, 27142721.
Benstetter, G., Ghoranneviss, M., Hantezadeh, M.R., Höpfl, R., Hora, H., Sari, A. & Salalouni, S. (2002). Microelectronics by Particle Irradiation 2002. German Patent Disclosure DE 102, 06, 581.0.
Bilek, M.M.M. (2001). Effect of sheath evolution on metal ion implantation in a vacuum arc plasma source. J. Appl. Phys. 89, 923927.
Boody, F.P., Höpfl, R., Hora, H. & Kelly, J.C. (1996). Laser-driven ion source for reduced-cost implantation of metal ions for strong reduction of dry friction and increased durability. Laser Part. Beams 14, 443448.
Chen, F.F. (1974). Physical mechanisms for laser-plasma parametric instabilities. In Laser Interaction and Related Plasma Phenomen (Schwarz, H. & Hora, H., Eds.). New York: Plenum Press.
Deutsch, C. (2004). Penetration of intense charge particle beams in the outer layers of precompressed thermonuclear fuels. Laser Part. Beams 22, 115120.
Doria, D., Lorusso, A., Belloni, F., Nassisi, V., Torrisi, L. & Gammino, S. (2004). A study of the parameters of particles ejected from a laser plasma. Laser Part. Beam 22, 461467.
Ehler, A.W. (1975). High-energy ions from CO2 laser-produced plasma. J. Appl. Phys. 46, 24642467.
Gitomer, S.J., Jones, R.D., Begay, F., Ehler, A.W., Kephart, J.F. & Kristal R. (1986). Fast ions and hot electrons in the laser–plasma interaction. Phys. Fluids 29, 26792688.
Glowacz, S., Hora, H., Badziak, J., Jablonski, S., Cang, Yu. & Osman, F. (2006). Analytical description of rippling effect and ion acceleration in plasma produced by a short laser pulse. Laser Part. Beam 23, in press.
Goldsmid, H.J., Hora, H. & Paul, G.L. (1984). Anomalous heat conduction of ion-implanted amorphous layers in silicon crystals using a laser-probe technique. Phys. Stat. Solidi 81, K127K130.
Haseroth, H. & Hora, H. (1996). Physical problems of the ion generation in laser driven ion sources. Laser Part. Beams 14, 395438.
Hinckley, S., Hora, H., Kane, E.L., Kelly, J.C., Kentwell, G., Lalousis, P., Lawrence, V.F., Mavaddat, R., Novak, M.M., Ray, P.S., Schwartz, A. & Ward, H.A. (1980). On irreversible effects at intensive irradiation. Experim. Techn. Phys. 28, 417434.
Hinckley, S., Hora, H. & Kelly, J.S. (1979). Subthreshold defect generation and annealing in silicon by intense electron beam bombardment. Phys. Stat. Solidi 51, 419428.
Hoffmann, D.H.H., Weyrich, K., Wahl, H., Gardes, D., Bimbot, R. & Fleurier, C. (1990). Energy-loss of heavy-ions in a plasma target. Phys. Rev. A 42, 23132321.
Hoffmann, D.H.H., Blazevic, A., Ni, P., Rosmej, O., Roth, M., Tahir, N.A., Tauschwitz, A., Udrea, S., Varentsov, D., Weyrich, K. & Maron, Y. (2005). Present and future perspectives for high energy density physics with intense heavy ion and laser beams. Laser Part. Beams 23, 4753.
Hora, H. (1961). Shift of absorption of evaporated silicon layers by bombardment with 75 keV. Naturwissenschaften 48, 641642.
Hora, H. (1962). Change of silicon by intensive bombardment with 50 kev electrons. Zeitschrift f. Angew. Phys. 14, 912.
Hora, H. (1969a). Self-focusing of laser beams in a plasma by ponderomotive forces. Zeitschrift d. Phys. 226, 156159.
Hora, H. (1969b). Nonlinear confining and deconfining forces associated with the interaction of laser radiation with plasma. Phys. Fluids 12, 182191.
Hora, H. (1975). Theory of relativistic self-focusing of laser radiation in plasmas. J. Opt. Soc. Am. 65, 882886.
Hora, H. (1976). Production of a barrier photo cell. German Pat. 2415399 (granted after patent court case 1977).
Hora, H. (1983). Stresses in silicon crystals from ion-implanted amorphous regions. Appl. Phys. A32, 15.
Hora, H. (1991). Plasmas at High Temperature and Density. Heidelberg: Springer.
Hora, H. (2004). Developments in inertial fusion energy and beam fusion at magnetic confinement. Laser Part. Beams 22, 439449.
Hora, H. (2003). Skin-depth theory explaining anomalous picosecond-terawatt laser plasma interaction II. Czech. J. Phys. 53, 199217.
Hora, H. & Aydin, M. (1999). Increased gain for ICF with red light at suppression of stochastic pulsation by smoothing. Laser Part. Beams 17, 209215.
Hora, H. & Aydin, M. (1992). Suppression of stochastic pulsation in laser-plasma interaction by smoothing methods. Phys. Rev. A45, 61236126.
Hora, H., Badziak, J., Boody, F., Höpfl, R., Jungwirth, K., Kralikowa, B., Kraska, J., Laska, L., Parys, P., Perina, V., Pfeifer, K. & Rohlena, J. (2002a). Effects of ps and ns laser pulses for giant ion source. Optics Commun. 207, 333338.
Hora, H., Pfirsch, D. & Schlüter, A. (1967). Acceleration of inhomogeneous plasma by laser light. Zeitsch. Naturforsch. 22A, 278280.
Hora, H., Osman, F., Höpfl, R., Badziak, J., Parys, P., Skala, J., Ullschmied, J., Wolowski, J., Woryna, E. Boody, F., Jungwirth, K., Kralikowà, B., Kraska, J., Laska, L., Pfeifer, M., Rohlena, K., Skala, J., &Ullschmied, J. (2002b). Skin depth theory explaining anomalous picosecond laser plasma interaction. Czech. J. Phys. 52, D349D361.
Jablonski, S., Hora, H., Glowacz, S., Badziak, J., Cang, Yu. & Osman, F. (2005). Two-fluid computations of plasma bock dynamics for numerical analyze of rippling effect. Laser Part. Beams 23, 433439.
Kreutz, E.V. (1976). X-Radiation effect in bulk silicon at subthreshold energies. Phys. Stat. Solidi 34a, 489495.
Mulser, P. & Bauer, D. (2004). Fast ignition of fusion pellets with superintense lasers: Concepts, problems, and prospective. Laser Part. Beams 22, 512.
Mulser, P. & Schneider, R. (2004). On the inefficiency of hole boring in fast ignition. Laser Part. Beams 22, 157162.
Osman, F, Cang, Y., Hora, H., Cao, L.H., Liu, H., Badziak, J., Parys, A.B., Wolowski, J., Worya, E., Jungwirth, K., Kralikova, B., Kraska, J., Laska, M., Pfeifer, M., Rohlena, K., Skala, J. & Ullschmied, J. (2004a). Skin depth plasma front interaction mechanism with prepulse suppression to avoid relativistic self-focusing for high-gain laser fusion. Laser Part. Beams 22, 8387.
Osman, F., Beech, R. & Hora, H. (2004b). Solutions of the nonlinear paraxial equation due to laser-plasma interactions. Laser Part. Beams 22, 6974.
Palmer, A.D. (1971). Stimulated scattering and self-focusing in laser-produced plasmas. Phys. Fluids 14, 27142718.
Purchi, G., Pandey, H.D. & Sharma, R.P. (2003). Effect of cross focusing of two laser beams on the growth of laser ripple in plasma. Laser Part. Beams 21, 567572.
Ramirez, J., Ramis, R. & Sanz, J. (2004). One-dimensional model for a laser-ablated slab under acceleration. Laser Part. Beams 22, 183188.
Richardson, M.C. & Alcock, A.J. (1971). Interferometric observation of plasma filaments in a laser-produced spark. Appl. Phys. Lett. 18, 357360.
Saini, M.S. & Gill, T.S. (2004). Enhanced raman scattering of a rippled laser beam in a magnetized collisional plasma. Laser Part. Beams 22, 3540.
Sari, A.H., Osman, F., Ghoranneviss, M., Hora, H., Höpfl, R. & Hantehzadeh, M.R. (2004). The effect of electron bombardment on optical properties of n-type silicon, Appl. Surf. Sci. 237, 161164.
Sharkov, B.Yu. & Hora, H. (1996). Preface, Special Issue on the Laser Ion Source. Laser Part. Beams 14, 275277.
Shearer, J.W. & Eddleman, J.L. (1973). Laser light forces and self-focusing in fully ionized plasmas. Phys. Fluid 16, 17531761.
Shockley, W. (1976). Electrons and Holes in Semiconductors. New York: Van Nostrand.
Siller, G., Büchl, K. & Hora, H. (1972). Intense electron emission from laser produced plasmas. In Laser Interaction and Related Plasma Phenomoena (Schwarz, H. & Hora, H., Eds.). New York: Plenum Press.
Thomas, O. (2004). Planning for the accelerator after LHC. Phys. J. 3, 1415.
Vavilov, V.S., Kiv, A.E. & Niyazova, O.R. (1975). The subthreshold radiation effects in semiconductors. Phys. Stat. Soldi 32a, 1133.
Weibel, E. (1957). Confining electrons in the nodes of standing microwaves. J. Electron. Contr. 5, 435446.
Wilks, S.C., Langdon, A.B., Cowan, T.E., Roth, M., Singh, M., Hackett, S., Key, M.H., Penningotn, D., Mackinnon, A. & Snavely, R.A. (2001). Energetic proton generation in ultra-intense laser-solid interaction. Phys. Plasmas 8, 542549.
Woryna, E., Wolowski, J., Kralikova, B., Kraska, J., Laska, M., Pfeifer, M., Rohlena, K., Skala, J., Perina, V., Boody, F.B., Höpfl, R. & Hora, H. (2000). Laser produced Ag ions for direct implantation. Rev. Sci, Instr. 71, 949951.
Zaikovskaya, M.A., Kiv, A.E., Niyazova, L.A.P. (1970). Subthreshold irradiation effects in silicon epitaxial films. Phys. Stat. Solidi 3a, 99104.
Zheng, L.R., Hung, L.S. & Mayer, J.W. (1989). Coevaporation and ion implantation of Pd50Ti50 and Pt50Ti50 on AISI stainless steels for reducing wear and friction. J. Appl. Phys. 65, 300304.
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