Skip to main content
×
Home
    • Aa
    • Aa

Enhancement of line X-ray emission from iron plasma created by laser irradiation of porous targets

  • R. Fazeli (a1), M.H. Mahdieh (a1) and G.J. Tallents (a2)
Abstract
Abstract

Enhancement of the line X-ray emission from iron plasma is investigated by simulating laser irradiation of both porous and solid targets. Spectral line intensities are calculated for selected lines of the iron plasma within the extreme ultra-violet lithography wavelength range 13.3–13.7 nm. The calculations show that X-ray yield in porous targets can be enhanced significantly in comparison with solid density targets. The results also show that for specified conditions of the driving laser, there are optimums conditions of the porous target in which maximum yield can be obtained.

Copyright
Corresponding author
Address correspondence and reprint requests to: R Fazeli, Department of Physics, Iran University of Science and Technology, Narmak, Tehran, Iran. E-mail: rfazeli@iust.ac.ir
Linked references
Hide All

This list contains references from the content that can be linked to their source. For a full set of references and notes please see the PDF or HTML where available.

S. Yulin , N. Benoit , T. Feigl & N. Kaiser (2006). Interface-engineered EUV multilayer mirrors. Microelectronic Engineering 83, 692694.

Recommend this journal

Email your librarian or administrator to recommend adding this journal to your organisation's collection.

Laser and Particle Beams
  • ISSN: 0263-0346
  • EISSN: 1469-803X
  • URL: /core/journals/laser-and-particle-beams
Please enter your name
Please enter a valid email address
Who would you like to send this to? *
×

Keywords:

Metrics

Full text views

Total number of HTML views: 2
Total number of PDF views: 7 *
Loading metrics...

Abstract views

Total abstract views: 68 *
Loading metrics...

* Views captured on Cambridge Core between September 2016 - 26th September 2017. This data will be updated every 24 hours.