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Hydrodynamic model for UV laser ablation of polymers

Published online by Cambridge University Press:  01 October 1999

Y.V. AFANASIEV ,
V.A. ISAKOV ,
I.N. ZAVESTOVSKAYA ,
B.N. CHICHKOV ,
F. VON ALVENSLEBEN  and
H. WELLING
Y.V. AFANASIEV
Affiliation:
P. N. Lebedev Physical Institute, Leninsky Prospect 53, Moscow 117924, Russia
V.A. ISAKOV
Affiliation:
P. N. Lebedev Physical Institute, Leninsky Prospect 53, Moscow 117924, Russia
I.N. ZAVESTOVSKAYA
Affiliation:
P. N. Lebedev Physical Institute, Leninsky Prospect 53, Moscow 117924, Russia
B.N. CHICHKOV
Affiliation:
Laser Zentrum Hannover e.V., Hollerithallee 8, D-30419 Hannover, Germany
F. VON ALVENSLEBEN
Affiliation:
Laser Zentrum Hannover e.V., Hollerithallee 8, D-30419 Hannover, Germany
H. WELLING
Affiliation:
Laser Zentrum Hannover e.V., Hollerithallee 8, D-30419 Hannover, Germany
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Abstract

The applicability of hydrodynamic models for theoretical description of UV laser ablation of polymers is studied. The plume formation is considered as a first-kind phase transition. In case of strongly absorbing polymers this phase transition occurs as a surface evaporation, and in case of weakly absorbing polymers as a bulk evaporation. The vapor plume is assumed to be transparent for laser radiation, and its expansion is described by the isoentropic hydrodynamic equations. New analytical expressions for ablation (etch) depths per pulse are obtained, which are in good agreement with the available experimental data (Afanasiev et al. 1997).

Type
Research Article
Information
Laser and Particle Beams , Volume 17 , Issue 4 , October 1999 , pp. 585 - 590
Copyright
1999 Cambridge University Press

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