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Influence of pulse repetition rate on the average size of silicon nanoparticles deposited by laser ablation

Published online by Cambridge University Press:  28 February 2007

YING-LONG WANG
Affiliation:
College of Physics Science and Technology, Hebei University, Baoding, China
WEI XU
Affiliation:
College of Physics Science and Technology, Hebei University, Baoding, China
YANG ZHOU
Affiliation:
College of Physics Science and Technology, Hebei University, Baoding, China
LI-ZHI CHU
Affiliation:
College of Physics Science and Technology, Hebei University, Baoding, China
GUANG-SHENG FU
Affiliation:
College of Physics Science and Technology, Hebei University, Baoding, China

Abstract

To investigate the influence of pulse repetition rate on the average size of the nanoparticles, nanocrystalline Si films were prepared by pulsed laser ablation in high-purity Ar gas with a pressure of 10 Pa at room temperature, under the pulse repetition rates between 1 and 40 Hz, using a nanosecond laser. Raman, X-ray diffraction spectra, and scanning electron microscopy images show that with increasing pulse repetition rate, the average size of the nanoparticles in the film first decreases and reach its minimum at 20 Hz, and then increases, which may be attributed to the nonlinear dynamics of the laser-ablative deposition. In our experiment conditions, the duration of the ambient restoration, a characteristic parameter being used to distinguish nonlinear or linear region, is about a few seconds from the order of magnitude, which is consistent with the previous experimental observation. More detailed model to explain quantitively the observed effect is under investigation.

Type
Research Article
Copyright
© 2007 Cambridge University Press

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References

REFERENCES

Alti, K. & Khare, A. (2006). Low-energy low-divergence pulsed indium atomic beam by laser ablation. Laser Part. Beams 24, 4753.Google Scholar
Bruneau, S., Hermann, J., Dumitru, G., Sentis, M. & Axente, E. (2005). Ultra-fast laser ablation applied to deep-drilling of metals. Appl. Surf. Sci. 248, 299303.Google Scholar
Cardona, M. & Guntherodt, G. (1980). Light Scattering in Solids. New York: Springer-Verlag.
Chen, X.Y., Lu, Y.F., Wu, Y.H., Cho, B.J., Liu, M.H., Daid, D.Y. & Song, W.D. (2003). Mechanisms of photoluminescence from silicon nanocrystals formed by pulsed-laser deposition in argon and oxygen ambient. J. Appl. Phys. 93, 63116319.Google Scholar
Eliezer, S., Eliaz, N., Grossman, E., Fisher, D., Gouzman, I., Henis, Z., Pecker, S., Horovitz, Y., Fraenkel, M., Maman, S. & Lereah, Y. (2004). Synthesis of nanoparticles with femtosecond laser pulses. Phys. Rev. B 69, 144119.Google Scholar
Eliezer, S., Eliaz, N., Grossman, E., Fisher, D., Gouzman, I., Henis, Z., Pecker, S., Horovitz, Y., Fraenkel, M., Maman, S., Ezersky, V. & Eliezer, D. (2005). Nanoparticles and nanotubes induced by femtosecond lasers. Laser Part. Beams 23, 1519.Google Scholar
Fernandez, J.C., Hegelich, B.M., Cobble, J.A., Flippo, K.A., Letaring, S.A., Johnson, R.P., Gautier, D.C., Shimada, T., Kyrala, G.A., Wang Y., Wetteland, C.J., &Schreiber, J. (2005). Laser-ablation treatment of short-pulse laser targets: Toward an experimental program on energetic-ion interactions with dense plasmas. Laser Part. Beams 23, 267273.Google Scholar
Fu, G.S., Wang, Y.L., Chu, L.Z., Zhou, Y., Yu, W., Han, L. & Peng, Y.C. (2005). The size distribution of Si nanoparticles prepared by pulsed-laser ablation in pure He, Ar or Ne gas. Europhys. Lett. 69, 758762.Google Scholar
Gamaly, E.G., Luther-Davies, B., Kolev, V.Z., Madsen, N.R., Duering, M. & Rode, A.V. (2005). Ablation of metals with picosecond laser pulses: Evidence of long-lived non-equilibrium surface states. Laser Part. Beams 23, 167176.Google Scholar
Geohegan, D.B., Puretzky, A.A., Duscher, G. & Pennycook, S.J. (1998). Time-resolved imaging of gas phase nanoparticle synthesis by laser ablation. Appl. Phys. Lett. 72, 29872989.Google Scholar
Han, M., Gong, Y.C., Zhou, J.F., Yin, C.R., Song, F.Q., Muto, N., Takiya, T. & Iwata, Y. (2002). Plume dynamics during film and nanoparticles deposition by pulsed laser ablation. Phys. Lett. A 302, 182198.Google Scholar
Kabashin, A.V., Sylvestre, J.P., Patskovsky, S. & Meunier, M. (2002). Correlation between photoluminescence properties and morphology of laser-ablated Si/SiOx nanostructured films. J. Appl. Phys. 91, 32483254.Google Scholar
Lowndes, D.H., Rouleu, C.M., Thundat, T., Duscher, G., Kenik, E.A. & Pennycook, S.J. (1998). Silicon and zinc telluride nanoparticles synthesized by pulsed laser ablation: Size distributions and nanoscale structure. Appl. Surf. Sci. 127–129, 355361.Google Scholar
Muramoto, J., Inmaru, T., Nakata, Y., Okada, T. & Maeda, M. (1999a). Influence of ambient gas on formation process of Si nanoparticles by laser ablation. Appl. Phys. A 69, S239S241.Google Scholar
Muramoto, J., Sakamoto, I., Nakata, Y., Okada, T. & Maeda, M. (1999b). Influence of electric field on the behavior of Si nanoparticles generated by laser ablation. Appl. Phys. Lett. 75, 751753.Google Scholar
Patterson, A.L. (1939). The Scherrer formula for X-ray particle size determination. Phys. Rev. 56, 978982.Google Scholar
Pavesi, L., Negro, L.D., Mazzoleni, C., Franzo, G. & Priolo, F. (2000). Optical gain in silicon nanocrystals. Nature 408, 440444.Google Scholar
Polman, A. (2002). Photonic materials: Teaching silicon new tricks. Nat. Mater. 1, 10.Google Scholar
Singh, R.K. & Narayan, J. (1990). Pulsed-laser evaporation technique for deposition of thin films: Physics and theoretical model. Phys. Rev. B 41, 88438859.Google Scholar
Trusso, S., Barletta, E., Barreca, F., Fazio, E. & Neri, F. (2005). Time resolved imaging studies of the plasma produced by laser ablation of silicon in O2/Ar atmosphere. Laser Part. Beams 23, 149153.Google Scholar
Veiko, V.P., Shakhno, E.A., Smirnov, V.N., Miaskovski, A.M. & Nikishin, G.D. (2006). Laser-induced film deposition by LIFT: Physical mechanisms and applications. Laser Part. Beams 24, 203209.Google Scholar
Wang, Y.L., Fu, G.S., Peng, Y.C., Zhou, Y., Chu, L.Z. & Zhang, R.M. (2004b). Influence of inert gas pressure on growing rate of nanocrystalline-silicon film prepared by pulsed laser deposition. Chin. Phys. Lett. 21, 201202.Google Scholar
Wang, Y.L., Zhang, R.M., Fu, G.S., Peng, Y.C. & Sun, Y.T. (2004a). Influence of inert gas pressure on the surface roughness of silicon film prepared by pulsed laser deposition. Chin. J. Lasers. 31, 698700.Google Scholar
Werwa, E., Seraphin, A.A., Chiu, L.A., Zhou, C. & Kolenbrander, K.D. (1994). Synthesis and processing of silicon nanocrystallites using a pulsed laser ablation supersonic expansion method. Appl. Phys. Lett. 64, 18211823.Google Scholar
Wieger, V., Strassl, M. & Wintner E. (2006). Pico- and microsecond laser ablation of dental restorative. Laser Part. Beams 24, 4145.Google Scholar
Yoshida, T., Takeyama, S., Yamada, Y. & Mutoh, K. (1996). Nanometer-sized silicon crystallites prepared by excimer laser ablation in constant pressure inert gas. Appl. Phys. Lett. 68, 17721774.Google Scholar