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Nucleation and growth of nanoparticles during pulsed laser deposition in an ambient gas

Published online by Cambridge University Press:  15 March 2011

Y.L. Wang ,
C. Chen ,
X.C. Ding ,
L.Z. Chu ,
Z.C. Deng ,
W.H. Liang ,
J.Z Chen  and
G.S. Fu
Y.L. Wang*
Affiliation:
College of Physics Science and Technology, Hebei University, Baoding, China
C. Chen
Affiliation:
College of Physics Science and Technology, Hebei University, Baoding, China
X.C. Ding
Affiliation:
College of Physics Science and Technology, Hebei University, Baoding, China
L.Z. Chu
Affiliation:
College of Physics Science and Technology, Hebei University, Baoding, China
Z.C. Deng
Affiliation:
College of Physics Science and Technology, Hebei University, Baoding, China
W.H. Liang
Affiliation:
College of Physics Science and Technology, Hebei University, Baoding, China
J.Z Chen
Affiliation:
College of Physics Science and Technology, Hebei University, Baoding, China
G.S. Fu
Affiliation:
College of Physics Science and Technology, Hebei University, Baoding, China
*
Address correspondence and reprint requests to: Ying-Long Wang, College of Physics Science and Technology, Hebei University, Baoding 071002, China. E-mail: hdwangyl@mail.hbu.edu.cn
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Abstract

We present a method to determine where the nanoparticles nucleate and grow during pulsed laser deposition in an ambient gas. Briefly, nanocrystalline Si films are systemically deposited on the substrates located at a distance from the plasma and placed in horizontal direction; meanwhile an external electric field is introduced perpendicularly to the plume. Based on the transportation dynamics of Si nanoparticles corresponding to different electric fields, the lateral nucleation range of 0.1 to 33.8 mm is determined for Si nanoparticles deposited in 10 Pa Ar gas at a laser fluence of 4 J/cm2. Further simulation of the mass and area density of Si nanoparticles demonstrates that both nucleation and growth probabilities in nucleation region are approximately Gauss-dependent of the lateral distance.

Keywords

NanoparticleNanoscale structureNucleation and growthNucleation regionPulsed laser deposition

Information

Type
Research Article
Information
Laser and Particle Beams , Volume 29 , Issue 1 , March 2011 , pp. 105 - 111
Copyright
Copyright © Cambridge University Press 2011

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