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Combinatorial Synthesis and Evaluation of Functional Inorganic Materials Using Thin-Film Techniques

Abstract
Abstract

Novel phases of functional inorganic chemical systems can be efficiently explored using high-throughput thin-film fabrication techniques coupled with rapid characterization schemes. High-throughput investigation of thin-film materials has already led to the discovery of new dielectric and magnetic materials. In this article, we review various high-throughput thin-film synthesis/evaluation techniques and discuss examples of exciting discoveries and new applications of combinatorial techniques.

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1.Xiang X.-D., Sun X.-D., Briceño G., Lou Y., Wang K.-A., Chang H., Wallace-Freedman W.G., Chen S.-W., and Schultz P.G., Science 268 (1995) p. 1738.
2.Briceño G., Chang H., Sun X.-D., Schultz P.G., and Xiang X.-D., Science 270 (1995) p. 273.
3.Chang H., Gao C., Takeuchi I., Yoo Y., Wang J., Schultz P.G., Xiang X.-D., Sharma R.P., Downes M., and Venkatesan T., Appl. Phys. Lett. 72 (1998) p. 2185.
4.Chang H., Takeuchi I., and Xiang X.-D., Appl. Phys. Lett. 74 (1999) p. 1165.
5.Takeuchi I., Chang H., Gao C., Schultz P.G., Xiang X.-D., Sharma R.P., Downes M.J., and Venkatesan T., Appl. Phys. Lett. 73 (1998) p. 894.
6.Takeuchi I., Chang K., Sharma R.P., Bendersky L.A., Chang H., Xiang X.-D., Stach E.A., and Song C.-Y., J. Appl. Phys. 90 (2001) p. 2474.
7.Koinuma H., Solid State Ionics 108 (1998) p. 1.
8.Koinuma H., Appl. Surface Sci. (Proc. 1st Japan–U.S. Workshop on Combinatorial Materials Sci. & Tech., 2002) in press.
9.Koinuma H., Koinda T., Ohnishi T., Komiyama D., Lippmaa M., and Kawasaki M., Appl. Phys. A 69 (1999) p. S29.
10.Kawasaki M., Takahashi K., Maeda T., Tsuchiya R., Shinohara M., Ishiyama O., Yonezawa T., Yoshimoto M., and Koinuma H., Science 266 (1994) p. 1540.
11.Ohnishi T., Komiyama D., Koida T., Ohashi S., Stauter C., Koinuma H., Ohtomo A., Lippmaa M., Nakagawa N., Kawasaki M., Kikuchi T., and Omote K., Appl. Phys. Lett. 79 (2001) p. 536.
12.Wei T., Xiang X.-D., Wallace-Freedman W.G., and Schultz P.G., Appl. Phys. Lett. 68 (1996) p. 3506.
13.Gao C. and Xiang X.-D., Rev. Sci. Instrum. 69 (1998) p. 3846.
14.Takeuchi I., Wei T., Duewer F., Yoo Y.K., Xiang X.-D., Talyansky V., Pai S.P., Chen G.J., and Venkatesan T., Appl. Phys. Lett. 71 (1997) p. 2026.
15.Chang K.S., Aronova M., Famodu O., Takeuchi I., Lofland S.E., Hattrick-Simpers J., and Chang H., Appl. Phys. Lett. 79 (2001) p. 4411.
16.Isaacs E.D., Kao M., Aeppli G., Xiang X.-D., Sun X.-D., Schultz P., Marcus M.A., Cargill G.S., and Haushalter R., Appl. Phys. Lett. 73 (1998) p. 1820.
17.Yoo Y.K., Ohnishi T., Wang G., Duewer F.W., Xiang X.-D., Chu Y.-S., Mancini D.C., Li Y.-Q., and O'Handley R.C., Intermetallics 9 (2001) p. 541.
18.Omote K., Kikuchi T., Harada J., Kawasaki M., Ohtomo A., Ohtani M., Ohnishi T., Komiyama D., and Koinuma H., in Proc. SPIE, Vol. 3941 (SPIE—The International Society for Optical Engineering, Bellingham, WA, 2000) p. 84.
19.Chang W., Horwitz J.S., Kim W.-J., Pond J.M., Kirchoefer S.W., and Chrisey D.B., in Ferroelectric Thin Films VII, edited by Jones R.E., Schwartz R.W., Summerfelt S.R., and Yoo I.K. (Mater. Res. Soc. Symp. Proc. 541, Warrendale, PA, 1999) p. 699.
20.van Dover R.B., Schneemeyer L.F., and Fleming R.M., Nature 392 (1998) p. 162.
21.van Dover R.B. and Schneemeyer L.F., IEEE Electron Device Lett. 19 (1998) p. 329.
22.van Dover R.B., Siegrist T., Schneemeyer L.F., Green M.L., and Manchanda L., Nature (2002) submitted for publication.
23.Wilk G.D., Wallace R.M., and Anthony J.M., J. Appl. Phys. 87 (2000) p. 484.
24.Hubbard K.J. and Schlom D.G., J. Mater. Res. 11 (1996) p. 2757.
25.Matsumoto Y., Murakami M., Shono T., Hasegawa T., Fukumura T., Kawasaki M., Ahmet P., Chikyow T., Koshihara S., and Koinuma H., Science 291 (2001) p. 854.
26.Matsumoto Y., Takahashi R., Murakami M., Koida T., Fan X.-J., Hasagawa T., Fukumura T., Kawasaki M., Koshihara S., and Koinuma H., Jpn. J. Appl. Phys., Part 2: Lett. 40 (2001) p. L1204.
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MRS Bulletin
  • ISSN: 0883-7694
  • EISSN: 1938-1425
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