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Combinatorial Synthesis and Evaluation of Functional Inorganic Materials Using Thin-Film Techniques


Novel phases of functional inorganic chemical systems can be efficiently explored using high-throughput thin-film fabrication techniques coupled with rapid characterization schemes. High-throughput investigation of thin-film materials has already led to the discovery of new dielectric and magnetic materials. In this article, we review various high-throughput thin-film synthesis/evaluation techniques and discuss examples of exciting discoveries and new applications of combinatorial techniques.

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MRS Bulletin
  • ISSN: 0883-7694
  • EISSN: 1938-1425
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