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Type: Conference Reports
Information: MRS Bulletin , Volume 30 , Issue 12: Fabrication of Sub-45-nm Device Structures , December 2005 , pp. 991 - 994

DOI: https://doi.org/10.1557/mrs2005.263 [Opens in a new window]

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Conference Reports

Volume 30, Issue 12
DOI: https://doi.org/10.1557/mrs2005.263

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