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The DMDTM Projection Display Chip: A MEMS-Based Technology

Abstract

The possibility of an all-digital (sourceto-eye) projection display was realized in 1987 with the invention of the Digital Micromirror Device™ projection display chip at Texas Instruments (TI). The DMD™ chip is a microelectromechanical systems (MEMS) array of fast digital micromirrors, monolithically integrated onto and controlled by an underlying silicon memory chip. Digital Light Processing™ projection displays are based on the DMD chip. DLP™ projection displays present bright, seamless images to the eye that have high image fidelity, and stability.

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1Hornbeck L.J., Howell T.R., Knipe R.L., and Mignardi M.A., in Microelectronic Systems 1997, DSC-Vol. 62 (American Society of Mechanical Engineers, New York, 1997) p.3.
2Texas Instruments Technical Journal (special DLPTM technology issue) 15 (3)(1998), available online at www.dlp.com/dlp/resources/over_ TITJ.asp, then click on the title of interest to download the file in PDF format: L.J. Hornbeck, “From Cathode Rays to Digital Micromirrors: A History of Electronic Projection Display Technology,” p.7; M.A. Mignardi, “From ICs to DMDs,” p.56; R.E. Meier, “DMD Pixel Mechanics Simulation,” p.64; H. Chu, A. Gonzalez, T. Oudal, R. Aldridge, D. Dudasko, and P. Barker, “DMD Superstructure Characterizations,” p.75; J.Faris and T. Kocian, “DMD Packages—Evolution & Strategy,” p.87; M. Douglass and A. Sontheimer, “Identifying and Eliminating DLPFailure Modes through Accelerated Stress Testing,” p.128.
3Kessel P.F. van, Hornbeck L.J., Meier R.E., and Douglass M.R., in Proc. IEEE 86 (1998) p.1687. Good review of DMD operation, micro-mirror dynamics, manufacturing, reliability, optical system design, and system electronics.
4Douglass M.R., in Proc. 1998 IEEE Int. Reliability Physics Symp. (Institute of Electrical and Electronics Engineers, Piscataway, NJ, 1998) p.9.
5Mignardi M.A., Gale R.O., Dawson D.J., and Smith J.C., in MEMS and MOEMS Technologies and Applications, Vol. PM85, edited by Rai-Choudhury P. (SPIE Press, Bellingham, WA, 2000) p.169.
6Bang C., Bright V., Mignardi M.A., Kocian T., and Monk D., in MEMS and MOEMS Technologies and Applications, Vol. PM85, edited by Rai-Choudhury P. (SPIE Press, Bellingham, WA, 2000) p.331.
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MRS Bulletin
  • ISSN: 0883-7694
  • EISSN: 1938-1425
  • URL: /core/journals/mrs-bulletin
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